Universal coupler for a self aligning linear actuator
AssigneeApplied Materials, Inc.
InventorMikhail Mazur
Life of this patent
Estimating the term…
Abstract
A universal coupler for a self aligning linear actuator for a valve assembly. The self aligning linear actuator utilizes a drive screw or other threaded drive means to drive a plunger for a throttle valve. The drive screw rotates within a frame while a threaded collar or ball screw coupled to a drive coupler drives the plunger parallel to the drive screw. The universal coupler relieves any bending strain induced by misalignment between the drive screw and the plunger by allowing pivotal movement of the drive coupler relative to the drive screw.
Claims20
A universal coupler for a self aligning linear actuator, comprising:
- an outer cylinder having a first axial bore;
- a first inner cylinder, disposed within said first axial bore, substantially coaxially aligned with said outer cylinder;
- and
- a second inner cylinder disposed within said first axial bore, substantially coaxially aligned with said outer cylinder and said first inner cylinder and having a plurality of fastening means disposed within said second inner cylinder;
- wherein said first and second inner cylinders are pivotally connected to said outer cylinder such that pivotal movement of one or both of said inner cylinders relieves a bending strain between a driving member coupled to said first inner cylinder and a drive coupler coupled to said second inner cylinder via said fastening means due to misalignment between said driving member and said drive coupler.
A self aligning lift screw mechanism, comprising:
- a threaded driving member, adapted for rotational movement about a first axis;
- a drive coupler, coupled to said driving member, adapted for translational movement along a second axis that is substantially parallel to said first axis;
- a threaded collar, that threadedly engages said driving member;
- and
- a universal coupler, having a plurality of fastening means disposed thereon for attaching said drive coupler, the universal coupler connected to said collar and said drive coupler, such that said driving member imparts translational movement to said drive coupler along said second axis when said driving member rotates about said first axis,
- wherein said universal coupler relieves a bending strain between said driving member and said drive coupler by allowing pivotal movement of one or both of said driving member and said drive coupler due to misalignment therebetween.
A throttle valve assembly, comprising:
- a valve body;
- a housing attached to said valve body;
- a threaded driving member, mounted within said housing for rotational movement about a first axis;
- a motor, directly coupled to said driving member, for imparting rotational movement to said driving member about said first axis;
- a drive coupler, coupled to said driving member, adapted for translational movement along a second axis that is substantially parallel to said first axis;
- a plunger guide, substantially aligned with said second axis, attached at a first end to said drive coupler such that linear motion of said drive coupler imparts linear motion to said plunger guide;
- a plunger, attached to a second end of said plunger guide, disposed within said valve body;
- a threaded collar, that engages threads of said driving member;
- and
- a universal coupler,having a plurality of fastening means disposed thereon for attaching said drive coupler, the universal coupler connected to said collar and said drive coupler, such that said driving member axis imparts translational movement to said drive coupler along said second axis when said driving member rotates about said first,
- wherein said universal coupler relieves a bending strain between said driving member and said drive coupler by allowing pivotal movement of one or both of said driving member and said drive coupler due to misalignment therebetween.
Dependencies are inferred from the claim text.