Ball arrangement method and ball arrangement apparatus
AssigneeNippon Micrometal Corporation
InventorsNobuaki Hayashi, Kouhei Katoh
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AssigneeNippon Micrometal Corporation
InventorsNobuaki Hayashi, Kouhei Katoh
Estimating the term…
The present invention relates to a method and an apparatus for arranging fine balls serving as a ball bump particularly on electrodes on a semiconductor chip, electrodes on a semiconductor-mounting substrate, or electrodes on a semiconductor device. It is made possible to remove small-diameter balls by, firstly, using a pre-arrangement plate for arranging the balls and using two diameters for the ball trap holes of the pre-arrangement plate. Secondly, occurrence of a ball suction abnormality and the time required for sucking the balls is reduced by using the pre-arrangement plate and a ball feeder. Thirdly, a ball suction abnormality to the ball arrangement device is determined by detecting the air flow velocity in an evacuation route of the ball arrangement device.
A method of attaching balls to an object, comprising the steps of:
An apparatus for attaching balls to an object, comprising:
A method of attaching balls to an object, comprising the steps of:
An apparatus for attaching balls onto an object, comprising:
Dependencies are inferred from the claim text.