Spin-on glass anti-reflective coatings for photolithography
AssigneeAllied-Signal Inc.
InventorsJoseph Kennedy, Teresa Baldwin, Nigel P. Hacker, Richard Spear
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Abstract
Anti-reflective coating materials for deep ultraviolet photolithography include one or more organic dyes incorporated into spin-on-glass materials. Suitable dyes are strongly absorbing over wavelength ranges around wavelengths less than 260 nm such as 248 nm and 193 nm, that may be used in photolithography. A method of making dyed spin-on-glass materials includes combining one or more organic dyes with alkoxysilane reactants during synthesis of the spin-on-glass materials.
Claims18
A dyed spin-on-glass composition comprising a siloxane polymer and an incorporatable organic dye that strongly absorbs light over at least an approximately 10 nm wide wavelength range, the range at wavelengths less than about 260 nm.
A method of making a dyed spin-on-glass composition comprising:
- combining one or more alkoxysilanes, one or more incorporatable organic dyes, an acid/water mixture, and one or more solvents to form a reaction mixture, wherein the organic dyes strongly absorb light over at least an approximately 10 nm wide wavelength range, the range at wavelengths less than about 260 nm;
- and
- refluxing the reaction mixture to form the dyed spin-on-glass composition.
A method of making a dyed spin-on-glass composition comprising:
- combining one or more alkoxysilanes, one or more incorporatable organic dyes, and one or more solvents to form a first reaction mixture, wherein the organic dyes strongly absorb light over at least an approximately 10 nm wide wavelength range, the range at wavelengths less than about 260 nm;
- refluxing the first reaction mixture;
- adding an acid/water mixture to the first reaction mixture to form a second reaction mixture.
- refluxing the second reaction mixture to form the dyed spin-on-glass composition.
A method of making a coating solution containing a dyed spin-on-glass polymer comprising:
- combining one or more alkoxysilanes, one or more incorporatable organic dyes, an acid/water mixture, and one or more solvents to form a reaction mixture, wherein the organic dyes strongly absorb light over at least an approximately 10 nm wide wavelength range, the range at wavelengths less than about 260 nm;
- refluxing the reaction mixture to form a dyed spin-on-glass polymer;
- and
- adding one or more dilutant solvents to the dyed spin-on-glass composition to produce a coating solution.
Dependencies are inferred from the claim text.