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US 6,267,648 B1Granted
Apparatus and method for chamfering wafer
AssigneeTokyo Seimitsu Co., Ltd.
InventorsIchiro Katayama, Masatami Iwaki, Kazumi Ikeda
Life of this patent
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Abstract
A grindstone and a wafer are rotated at high speeds in the same direction. The rotating wafer is slowly moved toward the rotating grindstone to thereby gradually chamfer the periphery of the wafer.
Claims21
A wafer chamfering method comprising the steps of:
- rotating a grindstone and a wafer at high speeds;
- getting the grindstone and the wafer closer to each other including getting the grindstone and the wafer closer to each by a predetermined distance and stopping to get the grindstone and the wafer closer to each other for a predetermined period, thereby gradually chamfering a periphery of the wafer by the grindstone,
- wherein the step of getting the grindstone and the wafer closer to each other is repeated.
A wafer chamfering method comprising the steps of:
- arranging a grindstone and a wafer separately on two parallel straight lines with a predetermined interval;
- rotating the grindstone and the wafer at high speeds;
- moving at least one of the wafer and the grindstone on the straight line to bring the grindstone into contact with a periphery of the wafer including getting the grindstone and the wafer closer to each by a predetermined distance and stopping to get the grindstone and the wafer closer to each other for a predetermined period, thereby gradually chamfering the periphery of the wafer by the grindstone,
- wherein the step of moving at least one of the wafer and the grindstone is repeated.
1 more element
A wafer chamfering method, comprising the steps of:
- roughly chamfering a periphery of a rotating wafer by a first rotating grindstone with a large diameter by getting the rotating wafer and the first rotating grindstone closer to each other;
- and
- finely chamfering the periphery of the rotating wafer by a second rotating grindstone with a small diameter by getting the rotating wafer and the second rotating grindstone closer to each other.
Dependencies are inferred from the claim text.