Polishing machine
AssigneeKabushiki Kaisha Toshiba
InventorEijiro Koike
Life of this patent
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Abstract
A polishing machine comprise a support unit for horizontally supporting a work piece at an outer peripheral edge thereof, to be freely rotatable with a central axis thereof serving as a center of the rotation, a rotation driving unit for driving rotation of the work piece with the central axis thereof serving as a center of the rotation, a polishing plate provided to be opposite to a surface of the work piece and reciprocate along a direction of a diameter of the work piece, and pressed onto the surface of the work piece at a predetermined force and polishing cloth provided between the polishing plate and the surface of the work piece.
Claims8
A polishing machine comprising:
- a support unit for supporting a work piece at an outer peripheral edge thereof, and for rotatably supporting the work piece at a central axis thereof serving as a center of the rotation;
- a driving unit for rotating the work piece with the central axis;
- a first polishing plate provided opposite to a surface of the work piece, to press onto the surface of the work piece and to reciprocate relatively along a direction of a diameter of the work piece;
- and
- a second polishing plate provided to be opposite to the polishing plate via the work piece, to press onto the other surface of the work piece, and to reciprocate synchronously the first polishing plate.
Dependencies are inferred from the claim text.