Electron-emitting element, method of making the same, and electronic device
AssigneeSumitomo Electric Industries, Ltd.
InventorsHirohisa Saito, Takashi Tsuno, Hiromu Shiomi, Yoshiaki Kumazawa, Takahiro Imai
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Abstract
An electron-emitting element comprises a diamond substrate, and a diamond protrusion grown on a surface of the diamond substrate so as to have a pointed portion in a form capable of emitting an electron. Since the diamond protrusion formed by growth has a sharply pointed tip portion, it can fully emit electrons. Preferably, the surface of the diamond substrate is a {100} face, and the diamond protrusion is surrounded by {111} faces.
Claims27
A method of making an electron-emitting element, said method comprising the steps of:
- (a) preparing a diamond substrate having a surface which includes a {100} surface;
- (b) forming a diamond seed projection on the {100} surface of said diamond substrate;
- and
- (c) forming a diamond protrusion which is surrounded by {111} faces by epitaxially growing diamond at said seed projection.
A method of making an electron-emitting element, said method comprising the steps of:
- (a) preparing a diamond substrate having a surface which includes a {110} surface;
- (b) forming a diamond seed projection on the {110} surface of said diamond substrate;
- and
- (c) forming a diamond protrusion which is surrounded by {111} and {100} faces by epitaxially growing diamond at said seed projection.
A method of making an electron-emitting element, said method comprising the steps of:
- (a) preparing a diamond substrate having a surface which includes a {111} surface;
- (b) forming a diamond seed projection on the {111} surface of said diamond substrate;
- and
- (c) forming a diamond protrusion which is surrounded by {110} faces by epitaxially growing diamond at said seed projection.
Dependencies are inferred from the claim text.