Method for manufacturing electron emission element, electron source, and image forming apparatus
AssigneeCanon Kabushiki Kaisha
InventorsToshikazu Onishi, Yoshikazu Banno, Michiyo Nishimura, Toshihiko Takeda, Keisuke Yamamoto, Tomoko Maruyama
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Abstract
A method for manufacturing an electron emission element comprising, between its electrodes, a conductive film having an electron emission section. The method comprising the steps of forming a gap in the conductive film located between the electrodes, and applying a voltage between the electrodes in an atmosphere that has an aromatic compound with a polarity or a polar group and in which the partial pressure ratio of water to the aromatic compound is 100 or less.
Claims15
A method for manufacturing an electron emission element comprising between its electrodes a conductive film having an electron emission section, the method comprising the steps of
- forming a gap in the conductive film located between the electrodes, and
- applying a voltage between the electrodes in an atmosphere that has an aromatic compound with a polarity or a polar group and in which the partial pressure ratio of water to the aromatic compound is 100 or less.
A method for manufacturing an electron emission element comprising between its electrodes a conductive film having an electron emission section, the method comprising the steps of
- forming a gap in the conductive film located between the electrodes, and
- applying a voltage between the electrodes in an atmosphere of an aromatic compound that has a polarity or a polar group and from which moisture has been removed.
A method for manufacturing an electron emission element comprising between its electrodes a conductive film having an electron emission section, the method comprising the steps of
- forming a gap in the conductive film located between the electrodes, and
- applying a voltage between the electrodes in a chamber from which moisture has been removed, in an atmosphere of an aromatic compound having a polarity or a polar group.
Dependencies are inferred from the claim text.