High-efficiency polycrystalline silicon resistor system for use in a thermal inkjet printhead

A high efficiency ink delivery printhead comprising:

• at least one resistor element positioned within said printhead for expelling ink on-demand therefrom, said resistor element being comprised of a phosphorous-doped polycrystalline silicon composition, said resistor element further comprising a substantially planar top surface;
• at least one primary layer of electrically conductive material which is operatively connected to said resistor element, said primary layer being comprised of titanium silicide and further comprising a substantially planar upper face, said upper face of said primary layer and said top surface of said resistor element being substantially coplanar relative to each other;
• and
• at least one additional layer of electrically conductive material positioned above said primary layer of electrically conductive material and being operatively attached thereto, said additional layer of electrically conductive material being comprised of an alloy comprising copper and aluminum therein, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween, said primary layer forming a conductive bridge within said gap between said additional layer and said resistor element.

An ink delivery system for use in generating printed images comprising:

• a printhead comprising:
• at least one resistor element positioned within said printhead for expelling ink on-demand therefrom, said resistor element being comprised of a doped polycrystalline silicon composition;
• at least one primary layer of electrically conductive material which is operatively connected to said resistor element, said primary layer being comprised of a metal silicide compound;
• and
• at least one additional layer of electrically conductive material positioned above said primary layer of electrically conductive material and being operatively attached thereto, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween, said primary layer forming a conductive bridge within said gap between said additional layer and said resistor element;
• and
• an ink containment vessel operatively connected to and in fluid communication with said printhead.

A method for producing a high efficiency ink delivery printhead comprising:

• providing at least one resistor element for expelling ink on-demand from said printhead, said resistor element being comprised of a doped polycrystalline silicon composition;
• forming at least one primary layer of electrically conductive material which is in operative connection with said resistor element, said primary layer being comprised of a metal silicide compound;
• and
• operatively attaching at least one additional layer of electrically conductive material in position within said printhead above said primary layer of electrically conductive material, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween, said primary layer forming a conductive bridge within said gap between said additional layer and said resistor element.

A method for producing a high efficiency ink delivery printhead comprising:

• providing a layer comprised of doped polycrystalline silicon;
• forming at least one resistor element from at least one portion of said layer of doped polycrystalline silicon, said resistor element expelling ink on-demand from said printhead;
• converting at least one additional portion of said layer of doped polycrystalline silicon into a metal silicide compound in order to produce at least one primary layer of electrically conductive material comprised of said metal silicide compound;
• and
• operatively attaching at least one additional layer of electrically conductive material in position within said printhead above said primary layer of electrically conductive material, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween, said primary layer forming a conductive bridge within said gap between said additional layer and said resistor element.

A high efficiency ink delivery printhead comprising:

• at least one resistor element positioned within said printhead for expelling ink on-demand therefrom, said resistor element being comprised of a doped polycrystalline silicon composition;
• at least one primary layer of electrically conductive material which is operatively connected to said resistor element, said primary layer being comprised of a metal silicide compound;
• a protective layer of dielectric material positioned above and operatively attached to said primary layer of electrically conductive material and said resistor element;
• at least one additional layer of electrically conductive material positioned above and operatively attached to said protective layer of dielectric material, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween;
• and
• at least one electrically conductive contact member positioned within said protective layer of dielectric material, said contact member being operatively connected to said additional layer of electrically conductive material which is located above said protective layer, with said contact member also being operatively connected to said primary layer of electrically conductive material which is located below said protective layer, said contact member forming an electrically conductive link between said additional layer and said primary layer.

An ink delivery system for use in generating printed images comprising:

• a printhead comprising:
• at least one resistor element positioned within said printhead for expelling ink on-demand therefrom, said resistor element being comprised of a doped polycrystalline silicon composition;
• at least one primary layer of electrically conductive material which is operatively connected to said resistor element, said primary layer being comprised of a metal silicide compound;
• at least one protective layer of dielectric material positioned above and operatively attached to said primary layer of electrically conductive material and said resistor element;
• at least one additional layer of electrically conductive material positioned above and operatively attached to said protective layer of dielectric material, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween;
• and
• at least one electrically conductive contact member positioned within said protective layer of dielectric material, said contact member being operatively connected to said additional layer of electrically conductive material which is located above said protective layer, with said contact member also being operatively connected to said primary layer of electrically conductive material which is located below said protective layer, said contact member forming an electrically conductive link between said additional layer and said primary layer;
• and
• an ink containment vessel operatively connected to and in fluid communication with said printhead.

A method for producing a high efficiency ink delivery printhead comprising:

• providing at least one resistor element for expelling ink on-demand from said printhead, said resistor element being comprised of a doped polycrystalline silicon composition;
• forming at least one primary layer of electrically conductive material in operative connection with said resistor element, said primary layer being comprised of a metal silicide compound;
• operatively attaching at least one protective layer of dielectric material in position within said printhead above said primary layer of electrically conductive material and said resistor element;
• forming at least one electrically conductive contact member within said protective layer of dielectric material;
• and
• operatively attaching at least one additional layer of electrically conductive material in position within said printhead above said protective layer of dielectric material, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween, said contact member being operatively connected to said additional layer of electrically conductive material which is located above said protective layer, with said contact member also being operatively connected to said primary layer of electrically conductive material which is located below said protective layer, said contact member forming an electrically conductive link between said additional layer and said primary layer.

A high efficiency ink delivery printhead comprising:

• at least one resistor element positioned within said printhead for expelling ink on-demand therefrom, said resistor element being comprised of a doped polycrystalline silicon composition;
• at least one primary layer of electrically conductive material which is operatively connected to said resistor element, said primary layer being comprised of a metal silicide compound;
• an intermediate portion of electrically conductive material positioned between said primary layer of electrically conductive material and said resistor element in order to form an electrically conductive pathway therebetween;
• and
• at least one additional layer of electrically conductive material positioned above said primary layer of electrically conductive material and being operatively attached thereto, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween, said primary layer forming a conductive bridge within said gap between said additional layer and said resistor element.

A high efficiency ink delivery printhead comprising:

• at least one resistor element positioned within said printhead for expelling ink on-demand therefrom, said resistor element being comprised of a doped polycrystalline silicon composition;
• at least one primary layer of electrically conductive material which is operatively connected to said resistor element, said primary layer being comprised of a metal silicide compound;
• an intermediate portion of electrically conductive material positioned between said primary layer of electrically conductive material and said resistor element in order to form an electrically conductive pathway therebetween, said intermediate portion of electrically conductive material being comprised of a doped polycrystalline silicon composition having a doping level which is greater than that of said resistor element, said resistor element likewise being comprised of a doped polycrystalline silicon composition;
• and
• at least one additional layer of electrically conductive material positioned above said primary layer of electrically conductive material and being operatively attached thereto, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween, said primary layer forming a conductive bridge within said gap between said additional layer and said resistor element.

A method for producing a high efficiency ink delivery printhead comprising:

• providing a layer comprised of doped polycrystalline silicon;
• forming at least one resistor element from at least one portion of said layer of doped polycrystalline silicon, said resistor element expelling ink on-demand from said printhead;
• further doping at least one additional portion of said layer of doped polycrystalline silicon so that said additional portion has a doping level which is greater than that of said portion of said layer of doped polycrystalline silicon which was used to produce said resistor element;
• converting said additional portion of said layer of doped polycrystalline silicon into a metal silicide compound in order to produce at least one primary layer of electrically conductive material comprised of said metal silicide compound;
• and
• operatively attaching at least one additional layer of electrically conductive material in position within said printhead above said primary layer of electrically conductive material, said additional layer terminating at a position within said printhead which is spaced outwardly and apart from said resistor element in order to form a gap therebetween, said primary layer forming a conductive bridge within said gap between said additional layer and said resistor element.