US 6,267,008 B1 · Angular rate detecting device · patentgrep

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Abstract

An oscillator 20 and main frames 30-1 and 30-2, coupled to one another by beams 33-1 through 33-4, float above the upper face of a substrate 10. The main frames 30-1 and 30-2 are divided into a plurality of sections along a Y-axis. Drive electrode portions 51-1 through 51-4 drive the main frames 30-1 and 30-2 and the oscillator 20 in the direction of an X-axis. Due to an angular rate around a Z-axis perpendicular to the X and Y axes, the oscillator 20 oscillates in the direction of the Y-axis. The oscillation in the direction of the Y-axis is measured using a high-frequency signal applied to detection electrode portions 53-1 through 53-4, whereby the angular rate is detected. The main frame 30-1 is provided with drive electrode portions 51-1 and 51-2, while the main frame 30-2 is provided with drive electrode portions 51-3 and 51-4. Drive signals independent from one another are supplied to the drive electrode portions 51-1 through 51-4, whereby the main frames 30-1 and 30-2 are caused to oscillate precisely in the direction of the X-axis.

Claims32

Dependent claims

An angular rate detecting device comprising:

an oscillation portion connected to a substrate via a supporting member and oscillatable over the substrate in directions of an X-axis and a Y-axis, the X and Y axes being perpendicular to one another;
a drive portion causing the oscillation portion to oscillate independently along the X-axis, the drive portion comprising a plurality of sectional drive portions spaced apart in the direction of the Y-axis, the sectional drive portions being capable of oscillating the oscillating portion independently in the direction of the X-axis;
a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis;
and
an angular rate detector for detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate that is effective around a Z-axis, the Z axis being perpendicular to both the X-axis and the Y-axis, with the oscillation portion oscillating in the direction of the X-axis.

2 more elements

An angular rate detecting device comprising:

a frame connected to a substrate via a driving beam and oscillatable with respect to the substrate in a direction of an X-axis;
an oscillator connected to the frame via the driving beam and supported oscillatably with respect to the substrate;
a drive portion causing the frame to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillator with respect to the substrate in a direction of a Y-axis, the Y-axis being perpendicular to the X-axis;
an angular rate detector detecting, based on oscillation of the oscillator in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X-axis and the Y-axis, wherein the flame and the oscillator oscillates in the direction of the X-axis;
and
a correction portion retrieving an oscillation component of the frame with respect to the substrate in the direction of the Y-axis.

4 more elements

An angular rate detecting device comprising:

an oscillation portion connected to a substrate via a supporting member, the oscillation portion being oscillatable over the substrate in directions of an X-axis and a Y-axis, the X-axis and the Y-axis being perpendicular to one another;
a drive portion causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis;
an angular rate detector detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X-axis and the Y-axis, wherein the oscillation portion oscillates in the direction of the X-axis;
a servo portion restraining oscillation of the oscillation portion in the direction of the Y-axis;
a drive circuit causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis with a predetermined amplitude, in cooperation with the drive portion;
a retrieval circuit retrieving a signal indicative of oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis, in cooperation with the detection portion;
a servo control circuit forming a servo control signal, based on the retrieved signal indicative of oscillation of the oscillation portion in the direction of the Y-axis, the servo control signal being supplied to the servo portion to restrain oscillation of the oscillation portion in the direction of the Y-axis;
and
an output circuit outputting a signal corresponding to the formed servo control signal as a signal indicative of the angular rate.

7 more elements

An angular rate detecting device comprising:

an oscillation portion connected to a substrate via a supporting member, the oscillation portion being oscillatable over the substrate along an X-axis and a Y-axis, the X and Y axes being perpendicular to one another;
a drive portion causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis;
an angular rate detector for detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X-axis and the Y-axis, wherein the oscillation portion oscillates in the direction of the X-axis;
a servo portion restraining oscillation of the oscillation portion in the direction of the Y-axis;
a drive circuit causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis with a predetermined amplitude, in cooperation with the drive portion;
a retrieval circuit retrieving a signal indicative of oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis, in cooperation with the detection portion;
a first servo control circuit forming a first servo control signal, based on the signal inputted from the retrieval circuit indicating oscillation of the oscillation portion in the direction of the Y-axis and a signal inputted from the drive circuit synchronous with oscillation of the oscillation portion caused by the angular rate, the first servo control signal being outputted to the servo portion to restrain oscillation of the oscillation portion in the direction of the Y-axis;
a second servo control circuit forming a second servo control signal, based on the signal that is inputted from the retrieval circuit and indicates oscillation of the oscillation portion in the direction of the Y-axis and a signal that is inputted from the drive circuit and is synchronous with the cross talk of the oscillation portion in the direction of the Y-axis caused by the driving thereof, the second servo control signal being supplied to the servo portion to restrain cross talk;
and
an output circuit outputting a signal corresponding to the first servo control signal as a signal indicative of the angular rate.

8 more elements

An angular rate detecting device comprising:

an oscillation portion connected to a substrate via a supporting member, the oscillation portion being oscillatable over the substrate in directions of an X-axis and a Y-axis, the X and Y axes being perpendicular to one another;
a drive portion causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis;
an angular rate detector detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X and Y axes, wherein the oscillation portion oscillates in the direction of the X-axis;
a servo portion restraining oscillation of the oscillation portion in the direction of the Y-axis;
a drive circuit causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis with a predetermined amplitude, in cooperation with the drive portion;
a retrieval circuit for retrieving a signal indicative of oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis, in cooperation with the detection portion;
a first servo control circuit inputting from the drive circuit a signal synchronous with oscillation of the oscillation portion caused by the angular rate, and inputting from the retrieval circuit a signal indicative of oscillation of the oscillation portion in the direction of the Y-axis, wherein, based on the inputted signals, the first servo control circuit forms a first servo control signal restraining oscillation of the oscillation portion in the direction of the Y-axis in accordance with the angular rate and supplies the first servo control signal to the servo portion to restrain oscillation of the oscillation portion in the direction of the Y-axis in accordance with the angular rate;
a second servo control circuit inputting from the drive circuit a signal different in phase from the signal that is synchronous with oscillation of the oscillation portion caused by the angular rate, and inputting from the retrieval circuit a detection signal indicative of oscillation of the oscillation portion in the direction of the Y-axis, forming a second servo control signal which restrains an oscillation component of the oscillation portion in the direction of the Y-axis which component is synchronous with the signal different in phase, wherein the second servo control circuit supplies the formed second servo control signal to the servo portion to restrain the oscillation component of the oscillation portion in the direction of the Y-axis which component is synchronous with the signal different in phase;
and
an output circuit for outputting a signal corresponding to the first servo control signal as a signal indicative of the angular rate.

8 more elements

Dependencies are inferred from the claim text.