Linear motor coil for exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorNobushige Korenaga
Life of this patent
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Abstract
A conductive foil is wound into a roll to provide a roll coil, and the roll coil is cut along wire paths, whereby a flat coil with a level difference is produced. Similarly, a flat coil without a level difference is sliced from the roll coil. The flat coil with a level difference and the flat coil without a level difference are then disposed with partial overlapping, while magnet side faces of the coils become coplanar with each other, to provide a unit coil. A plurality of unit coils can be placed juxtaposed with each other, to provide a stator for a linear motor. The number of working operations is reduced significantly, and the reliability of the coil itself is improved.
Claims33
A method of producing a coil with a level difference, comprising the steps of:
- winding a conductive foil into a roll to provide a roll coil;
- and
- slicing, by wire cutting, the roll coil so that a coil having a level difference formed thereon is produced.
A coil with a level difference, said coil comprising:
- a straight portion and a portion with the level difference, in which a conductive material for the coil has a shape defined by winding a conductive foil.
Dependencies are inferred from the claim text.