Device and method for producing a multilayered material
AssigneeTheva Duennschichttechnik GmbH
InventorsHelmut Kinder, Markus Bauer, Joachim Schwachulla
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AssigneeTheva Duennschichttechnik GmbH
InventorsHelmut Kinder, Markus Bauer, Joachim Schwachulla
Estimating the term…
In a method for producing laminate, a buffer layer is applied to a substrate, with the buffer layer material being evaporated from the buffer layer material dispensing devices at an angle α1≠0 at the normal to the substrate surface onto the latter, before an oriented thin layer is evaporated. According to the invention, provision is made such that (a) following evaporation of the buffer layer and prior to the evaporation of the oriented thin layer, at least one cover layer is evaporated under deposition conditions that vary from those under which the buffer layer was applied, especially at a different pressure, different temperature, different rate, and/or different angle α2≠α1, especially α2<α1, preferably α2≈0° to the substrate surface normal, and/or is evaporated on the buffer layer in such fashion that the buffer layer has a biaxial texture and/or facets.
A device for producing a laminate, comprising:
A method for producing laminate, comprising:
Dependencies are inferred from the claim text.