Tunable and matchable resonator coil assembly for ion implanter linear accelerator

A resonator circuit capable of resonating at a predetermined frequency, comprising:

• (i) a fixed position coil inductor (62) having a longitudinal axis (92) and a capacitor (88, 82) electrically connected in parallel with each other to form a resonator (60), so that respective first and second ends of said inductor and said capacitor are electrically coupled together at a high-voltage end (64) and a low-voltage end (66) of the resonator (60);
• (ii) a radio frequency (RF) input coupling (70) coupled to said inductor (62);
• (iii) a high-voltage electrode (72) coupled to said high-voltage end (64) of said resonator;
• (iv) a first resonator tuning mechanism for varying the inductance of said inductor, comprising a plunger (90) movable within the coil of said inductor (62) along said longitudinal axis (92);
• and
• (iv) a second resonator tuning mechanism for varying the capacitance of said capacitor (88, 82);
• wherein said first tuning mechanism provides fine tuning of the resonator circuit by means of varying the inductance of said inductor (62), and said second tuning mechanism provides coarse tuning of the resonator circuit by means of varying the capacitance of said capacitor (88, 82).

A resonator circuit capable of resonating at a predetermined frequency, comprising:

• (i) a fixed position coil inductor (62) having a longitudinal axis (92) and a capacitor (88, 82) electrically connected in parallel with each other to form a resonator (60), so that respective first and second ends of said inductor and said capacitor are electrically coupled together at a high-voltage end (64) and a low-voltage end (66) of the resonator (60);
• (ii) a radio frequency (RF) input coupling (70) coupled directly to said inductor (62) near said low-voltage end (66) of said resonator;
• and
• (iii) a high-voltage electrode (72) coupled to said high-voltage end (64) of said resonator;
• and
• (iv) a first resonator tuning mechanism for varying the inductance of said inductor, comprising a plunger (90) movable within the coil of said inductor (62) along said longitudinal axis (92).

A resonator circuit capable of resonating at a predetermined radio frequency (RF), comprising:

• (i) a fixed position coil inductor (62) having a longitudinal axis (92) and a capacitor (88, 82) electrically connected in parallel with each other to form a resonator (60), so that respective first and second ends of said inductor and said capacitor are electrically coupled together at a high-voltage end (64) and a low-voltage end (66) of the resonator (60), said fixed position coil inductor (62) being provided with a spacer (67) element to maintain a predetermined distance between coil loops;
• (ii) a radio frequency (RF) input coupling (70) coupled to said inductor (62);
• (iii) a high-voltage electrode (72) coupled to said high-voltage end (64) of said resonator for accelerating an ion beam;
• and
• (iv) a first resonator tuning mechanism for varying the inductance of said inductor, comprising a plunger (90) movable within the coil of said fixed position coil inductor (62) along said longitudinal axis (92).