Method for the formation of a cuprous oxide film and process for the production of a semiconductor device using said method
AssigneeCanon Kabushiki Kaisha
InventorsKatsumi Nakagawa, Kozo Arao, Yukiko Iwasaki
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Abstract
A film-forming method for forming a cuprous oxide film includes the steps of immersing a substrate having at least an electrically conductive surface in a solution containing copper ion and nitrate ion which are coexistent therein, and causing deposition of the cuprous oxide film on the electrically conductive surface of the substrate by way of cathodic reaction. A process for producing a semiconductor device such as a solar cell or a rectifier also is provided using the film-forming method.
Claims3
A method for forming a cuprous oxide film, comprising the steps of immersing a substrate having at least an electrically conductive surface in a solution containing copper ion and nitrate ion which are coexistent therein, and causing deposition of the cuprous oxide film on the electrically conductive surface of the substrate by way of cathodic reaction.
A method for selectively forming a cuprous oxide film, comprising the steps of providing a substrate whose surface has a pattern comprising an electrically conductive region and an electrically insulating region for a semiconductor device, immersing the substrate in a solution containing copper ion and nitrate ion which are coexistent therein, and causing selective deposition of the cuprous oxide film only on the electrically conductive surface region of the substrate by way of cathodic reaction.
A method for selectively forming a cuprous oxide film, comprising the steps of providing a substrate for a semiconductor device, the substrate having a surface with an electrically conductive partial region, a part of the electrically conductive partial region having a pattern comprising an aluminum or an alloy containing an aluminum as a matrix, immersing the substrate in a solution containing copper ion and nitrate ion which are coexistent therein, and causing selective deposition of the cuprous oxide film only on the electrically conductive region of the substrate other than the pattern comprising the aluminum or the alloy by way of cathodic reaction.
Dependencies are inferred from the claim text.