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US 6,258,625 B1Granted
Method of interconnecting electronic components using a plurality of conductive studs
AssigneeInternational Business Machines Corporation
InventorsPeter J. Brofman, Sudipta K. Ray, Kathleen A. Stalter
Life of this patent
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Abstract
A method of interconnecting electronic components by using a plurality of conductive studs on a surface of a first electronic component and a plurality of corresponding conductive vias on the surface of a second electronic component. Camber on the surface of electronic components may be overcome by coating the surface with a dielectric, planarizing the dielectric, and forming conductive vias corresponding to the contact pads thereon. The conductive studs are substantially lead-free and preferably comprise of copper.
Claims14
A method of interconnecting electronic components comprising the steps of:
- (a) providing a first electronic component having electrical devices with corresponding bonding pads, said first electronic component having a patterned dielectric film formed thereon, said dielectric film having a plurality of protruding conductive studs, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices;
- (b) providing a second electronic component having a dielectric film formed thereon, said dielectric film having a plurality of conductive vias corresponding to the studs on said first electronic component;
- (c) providing an interposer having electrical interconnections corresponding to the studs and vias;
- and
- (d) aligning said first electronic component and said second electronic component with said interposer disposed therebetween, such that the studs of said first electronic component and the vias of said second electronic component are adapted to be electrically interconnected by said interposer.
2 more elements
A method of interconnecting electronic components comprising the steps of:
- (a) providing a semiconductor chip having electrical devices with corresponding bonding pads, said semiconductor chip having a patterned dielectric film formed thereon, said dielectric film having a plurality of protruding conductive studs, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices;
- (b) providing a substrate having a cambered surface with a planarized dielectric film formed thereon having a plurality of planar conductive vias of varying depths corresponding to the studs on said semiconductor chip;
- (c) providing an interposer having electrical interconnections corresponding to the studs and vias;
- and
- (d) aligning said semiconductor chip and said substrate with said interposer disposed therebetween, such that the studs of said semiconductor chip and the vias of said substrate are adapted to be electrically interconnected by said interposer.
2 more elements
A method of interconnecting electronic components comprising the steps of:
- (a) providing a semiconductor chip having electrical devices with corresponding bonding pads, said chip having a patterned and cured polyimide film formed thereon, said polyimide film having a plurality of protruding conductive metal studs, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices with corresponding bonding pads, said semiconductor chip having a patterned dielectric film formed thereon, said dielectric film having a plurality of protruding conductive studs, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices;
- (b) providing a second electronic component having a dielectric film formed thereon, said dielectric film having a plurality of conductive vias corresponding to the studs on said semiconductor chip;
- (c) providing an interposer having electrical interconnections corresponding to the studs and vias;
- and
- (d) aligning said semiconductor chip and said second electronic component with said interposer disposed therebetween, such that the studs of said first electronic component and the vias of said second electronic component are adapted to be electrically interconnected by said interposer.
2 more elements
A method of interconnecting electronic components comprising the steps of:
- (a) providing a first electronic component having electrical devices with corresponding bonding pads, said first electronic component having a patterned dielectric film formed thereon, said dielectric film having a plurality of protruding conductive studs, said studs protruding about 15 μm to 20 μm from a surface of said dielectric film and having a diameter of about 50 μm to about 75 μm, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices;
- (b) providing a second electronic component having a dielectric film formed thereon, said dielectric film having a plurality of conductive vias corresponding to the studs on said first electronic component;
- (c) providing an interposer having electrical interconnections corresponding to the studs and vias;
- and
- (d) aligning said first electronic component and said second electronic component with said interposer disposed therebetween, such that the studs of said first electronic component and the vias of said second electronic component are adapted to be electrically interconnected by said interposer.
2 more elements
A method of interconnecting electronic components comprising the steps of:
- (a) providing a first electronic component having electrical devices with corresponding bonding pads, said first electronic component having a patterned dielectric film formed thereon, said dielectric film having a plurality of protruding conductive studs which comprise copper, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices;
- (b) providing a second electronic component having a dielectric film formed thereon, said dielectric film having a plurality of conductive vias corresponding to the studs on said first electronic component;
- (c) providing an interposer having electrical interconnections corresponding to the studs and vias;
- and
- (d) aligning said first electronic component and said second electronic component with said interposer disposed therebetween, such that the studs of said first electronic component and the vias of said second electronic component are adapted to be electrically interconnected by said interposer.
2 more elements
A method of interconnecting electronic components comprising the steps of:
- (a) providing a first electronic component having electrical devices with corresponding bonding pads, said first electronic component having a patterned dielectric film formed thereon, said dielectric film having a plurality of protruding conductive studs, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices;
- (b) providing a second electronic component having a substrate having a cured polyimide film formed thereon, said polyimide film having a plurality of copper vias substantially planar to a surface of said film and capped with gold, said vias corresponding to the studs on said first electronic component;
- (c) providing an interposer having electrical interconnections corresponding to the studs and vias;
- and
- (d) aligning said first electronic component and said second electronic component with said interposer disposed therebetween, such that the studs of said first electronic component and the vias of said second electronic component are adapted to be electrically interconnected by said interposer.
2 more elements
A method of interconnecting electronic components comprising the steps of:
- (a) providing a first electronic component having electrical devices with corresponding bonding pads, said first electronic component having a patterned dielectric film formed thereon, said dielectric film having a plurality of protruding conductive studs, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices;
- (b) providing a second electronic component having a dielectric film formed thereon, said dielectric film having a plurality of conductive vias corresponding to the studs on said first electronic component, and said vias have a depth of at least 15 to about 30 μm;
- (c) providing an interposer having electrical interconnections corresponding to the studs and vias;
- and
- (d) aligning said first electronic component and said second electronic component with said interposer disposed therebetween, such that the studs of said first electronic component and the vias of said second electronic component are adapted to be electrically interconnected by said interposer.
2 more elements
A method of interconnecting electronic components comprising the steps of:
- (a) providing a first electronic component having electrical devices with corresponding bonding pads, said first electronic component having a patterned dielectric film formed thereon, said dielectric film having a plurality of protruding conductive studs, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices;
- (b) providing a second electronic component having a substrate having a cambered surface with a planarized dielectric film formed thereon, said dielectric film having a plurality of planar conductive vias of varying depth corresponding to the studs on said first electronic component;
- (c) providing an interposer having electrical interconnections corresponding to the studs and vias;
- and
- (d) aligning said first electronic component and said second electronic component with said interposer disposed therebetween, such that the studs of said first electronic component and the vias of said second electronic component are adapted to be electrically interconnected by said interposer.
2 more elements
A method of interconnecting electronic components comprising the steps of:
- (a) providing a semiconductor chip having electrical devices with corresponding bonding pads, said semiconductor chip having a patterned dielectric film formed thereon, said dielectric film having a plurality of protruding conductive studs which comprise copper, said studs corresponding to the bonding pads and adapted for electrical connection to the electrical devices;
- (b) providing a substrate having a cambered surface with a planarized dielectric film formed thereon having a plurality of planar conductive vias of varying depths corresponding to the studs on said semiconductor chip;
- (c) providing an interposer having electrical interconnections corresponding to the studs and vias;
- and
- (d) aligning said semiconductor chip and said substrate with said interposer disposed therebetween, such that the studs of said semiconductor chip and the vias of said substrate are adapted to be electrically interconnected by said interposer.
2 more elements
Dependencies are inferred from the claim text.