Micro injecting device and a method of manufacturing
AssigneeSamsung Electronics Co., Ltd.
InventorByung-Sun Ahn
Life of this patent
Estimating the term…
Abstract
Disclosed is a micro-injection device, a method of manufacturing of the micro-injection device and method of use. The device comprises a liquid chamber separated from a working fluid chamber by an oscillating layer. The oscillating layer contains two regions: one having a high thermal expandibility and the other is a portion having a high impact transmittability. This structure gives the oscillating layer enhanced resistance against stress and enhances its performance. The device is particularly useful in ink-jet printing.
Claims43
A micro-injection device, comprising:
- a substrate;
- a protective layer on said substrate;
- a heating layer formed on said protective layer;
- an electrode layer formed on said substrate and said heating layer, conducting electricity to the heating layer;
- a heating chamber barrier layer formed on said electrode layer and said heating layer, defining a wall of a heating chamber;
- a flexible oscillating layer formed on said heating chamber barrier layer and extending across said heating chamber, said oscillating layer defining a top of said heating chamber, said oscillating layer comprising:
- a first expansion layer containing a grooved region;
- and
- a second expansion layer disposed in said grooved region of said first expansion layer;
- a liquid chamber barrier layer formed on said oscillating layer and separated from said heating chamber by said oscillating layer, said liquid chamber barrier layer defining a liquid chamber;
- and
- a nozzle plate formed on said liquid chamber barrier layer, perforated by a nozzle and enabling communication between said liquid chamber and an environment external to said micro-injection device.
A method of manufacturing a micro-injection device, comprising the steps of:
- making a first assembly, said first assembly comprising a heating layer and a heating chamber barrier layer formed on said heating layer;
- making an oscillating layer assembly, where said oscillating layer assembly comprises:
- a first expansion layer containing a grooved region, and
- a second expansion layer disposed in said grooved region of said first expansion layer;
- making a third assembly, said assembly comprising a liquid chamber barrier and a nozzle plate formed on said liquid chamber barrier;
- joining said oscillating layer assembly to said first assembly to create a joined lower assembly;
- and
- joining said third assembly to said joined lower assembly.
Dependencies are inferred from the claim text.