Method for controlling lots dispatches of tool groups
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorLi-Ren Lin
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorLi-Ren Lin
Estimating the term…
The present invention discloses a method for controlling lots' dispatch of tool groups, and all the lots can be transferred to correct places for further processing. The lots are transferred to the storage places of the tool when there is only a single tool for the next process. A decision step is performed for deciding whether the storage places of the next tool group and the next-next tool group overlap when the next process contains a tool group. If there are overlapped storage places, then the lots will be moved to the overlapped storage place having minimum loading. When there is no overlapped storage place, the lots will be dispatched to the storage place having minimum loading among the next tool group. All the lots can be processed with at minimum moving steps, and all the tools perform their processes under balance loading whenever the productions increase or decrease.
A method for controlling lots dispatch among storage places, said lots being processed according to a manufacturing sequence of tool groups, each of which include at least one tool for working on said lots, said method comprising the steps of:
Dependencies are inferred from the claim text.