# US 6,253,580 B1 · Method of making a tubular member for optical fiber production using plasma outside vapor deposition

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- Number: US 6,253,580 B1
- Document ID: US6253580B1
- Status: Granted
- Kind: B1
- Application number: 08/994,970
- Filed: 1997-12-19
- Granted: 2001-07-03
- Earliest claimed: 1997-12-19
- Assignees: Fibercore Limited
- Inventors: Mikhail Ivanovich Gouskov; Evguenic Borisovich Danilov; Mohammad Afzal Aslami; Dau Wu
- Web page: https://patentgrep.com/patent/US6253580B1

## CPC

- C03B 37/01426: {Plasma deposition burners or torches}
- C03B 37/01205: {starting from tubes, rods, fibres or filaments (C03B37/014 takes precedence)}
- C03B 2201/02: Pure silica glass, e.g. pure fused quartz
- C03B 2201/12: doped with fluorine (C03B2201/14 takes precedence)
- C03B: MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES

## Abstract

An apparatus and method for producing a tubular member, which is suitable for use as a starter tube or an optical fiber preform, on a rotating cylindrical target mounted on a lathe. The tubular member is made by means of plasma outside vapor deposition. In this process, a source gas comprising SiCl4 and, optionally, a fluorine-laden chemical, is introduced into an air plasma. Both the air and the source gas are dry gases and have low hydroxyl content. The air plasma is created by a high-frequency induction plasma torch which travels along the length of the target on a carriage. The torch is provided with a short U-shaped gutter on either side of its rim directly beneath the target and the growing tubular member. This gutter helps channel reaction products of the source gas and the plasma so as to enhance deposition on the growing tubular member. The torch is further provided with an induction coil having a plurality of windings, the uppermost winding being maintained a predetermined distance from the surface of the tubular member as the latter is built up.

## Claims

### Claim 1

A method for forming a substantially pure silica glass starter tube on a graphite target, the starter tube having a purity and index of refraction suitable for use in optical fiber formation, said method comprising steps of:
providing a high frequency induction plasma torch comprising a coil, said induction plasma torch being selectively positionable along a length of said target, a spacing of 30-35 mm separating the target from said coil;
introducing a plasma gas consisting essentially of a gas from a group consisting of (air, and a mixture of oxygen and nitrogen) and having a hydroxyl content of less than 2 ppm into the induction plasma torch to form a plasma within said coil;
injecting a source gas having at least SiCl4 and having a hydroxyl content of less than 0.5 ppm into said plasma;
depositing at least one reaction product of said plasma and said source gas onto the graphite target while maintaining said spacing between said target and the coil; and
removing said graphite target to obtain said substantially pure silica glass tube.

### Claim 2 (depends on 1)

The method of claim 1, wherein said coil comprises a plurality of windings, and the target is separated from a winding closest to the target by said spacing.

### Claim 3 (depends on 1)

The method of claim 1, comprising the additional step of drying the plasma gas before it is introduced into the induction plasma torch.

### Claim 4 (depends on 1)

A method according to claim 1, wherein the source gas is introduced into the plasma above all points at which there is plasma having a velocity which is zero in a direction parallel to a longitudinal axis of said coil.

### Claim 5 (depends on 1)

A method according to claim 1, wherein said plasma torch further comprises a stabilizer bar arranged at a top portion of the coil, such that said stabilizer bar extends parallel to the target, and is arranged between the target and the top of the coil in manner to spread the source gas and plasma onto the target.