Sealed-cavity microstructure and microbolometer and associated fabrication methods

A microstructure with at least one pressure-maintained cavity, said microstructure comprising:

• first and second wafers defining a cavity therebetween:
• a pressure seal between said first and second wafers that extends peripherally about the cavity to maintain a pre-determined pressure within said cavity;
• and
• a structural bond between said first and second wafers to structurally integrate at least a portion of said first and second wafers,
• wherein at least one of said first and second wafers defines a seal ring that extends peripherally about the cavity, wherein the pressure seal comprises a deformable metal deposited on the seal ring, and wherein the structural bond comprises a structural bond formed outside of and peripherally about at least a portion of the seal ring.

A microbolometer comprising:

• first and second wafers defining a cavity therebetween;
• at least one radiation detector suspended within the cavity;
• a vacuum seal between said first and second wafers that extends peripherally about the cavity to maintain a vacuum within said cavity;
• and
• a structural bond between said first and second wafers to structurally integrate at least a portion of said first and second wafers, wherein said structural bond provides sufficient support to said first and second wafers such that said vacuum seal is maintained intact during subsequent manufacture and use of the said microbolometer.

A microstructure with at least one pressure-maintained cavity, said microstructure comprising:

• first and second wafers defining a cavity therebetween;
• a pressure seal between said first and second wafers that extends peripherally about the cavity to maintain a pre-determined pressure within said cavity;
• and
• a structural bond between said first and second wafers to structurally integrate at least a portion of said first and second wafers, wherein said structural bond is formed outside of and peripherally about at least a portion of said pressure seal.

A microbolometer comprising:

• first and second wafers defining a cavity therebetween;
• at least one radiation detector suspended within the cavity;
• a vacuum seal between said first and second wafers that extends peripherally about the cavity to maintain a vacuum within said cavity;
• and
• a structural bond between said first and second wafers to structurally integrate at least a portion of said first and second wafers,
• wherein at least one of said first and second wafers defines a seal ring that extends peripherally about the cavity, wherein said vacuum seal comprises a deformable metal deposited on the seal ring, and wherein said structural bond is formed outside of and peripherally about at least a portion of said seal ring.

A microbolometer comprising:

• first and second wafers defining a cavity therebetween;
• at least one radiation detector suspended within the cavity;
• a vacuum seal between said first and second wafers that extends peripherally about the cavity to maintain a vacuum within said cavity;
• and
• a structural bond between said first and second wafers to structurally integrate at least a portion of said first and second wafers, wherein said structural bond is formed outside of and peripherally about at least a portion of said vacuum seal.