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US 6,251,473 B1Granted
Preparation of ceramic thin films by spray coating
AssigneeThe Trustees of the University of Pennsylvania
InventorsConghua Wang, Wayne L. Worrell
Life of this patent
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Abstract
A method for fabrication of solid ceramic thin films in which a porous or dense supporting substrate is spray coated with an oxide powder/solid suspension to form a coated supporting substrate. The coated supporting substrate is then sintered at an elevated temperature to form a solid ceramic thin film on the supporting substrate.
Claims16
A method for fabrication of solid ceramic thin films comprising the steps of:
- spray-coating one of a porous supporting substrate and a dense supporting substrate with at least one oxide powder/solvent suspension comprising in a range of about 0.01% to about 5% by volume of said at least one oxide powder, forming a coated supporting substrate;
- and
- sintering said coated supporting substrate at an elevated temperature, forming a solid ceramic film on said supporting substrate.
Dependencies are inferred from the claim text.