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US 6,249,990 B1Granted
Method and apparatus for transporting articles
AssigneeAlliedSignal Inc.
InventorsAdel George Tannous, Jeffrey Miller, Khalid Makhamreh
Life of this patent
Estimating the term…
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AssigneeAlliedSignal Inc.
InventorsAdel George Tannous, Jeffrey Miller, Khalid Makhamreh
Estimating the term…
In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of the first vessel (10) is closed and sealed against a door seal (24). The first vessel (10) is then purged with nitrogen to expel moisture and reactive gases from the interior of the first vessel (10). After purging, the first vessel (10) is then placed within the second vessel (90). The door (102) of the second vessel (90) is then closed and sealed against a door seal (104). The second vessel (90) is then purged with nitrogen to expel moisture and reactive gases from the interior of the second vessel (90). The cart (5) containing the integrated circuit substrate is then transported to the next manufacturing area. Integrated circuits and other articles may be manufacturing using the cart system of the present invention.
A cart for transporting an article in a manufacturing environment, comprising:
A method of transporting an article in a manufacturing environment, comprising the steps of:
A method, comprising the steps of:
Dependencies are inferred from the claim text.