Multi-beam drawing method using partially damaged light emitting devices and including spiral correction
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorsKoichi Isono, Takahiro Matsuo
Life of this patent
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Abstract
In a multi-beam drawing method in which drawing is performed with a plurality of light-emitting devices (LDs), it is detected whether any LD is damaged. Of a plurality of partial LD lines obtained by partitioning at a damaged LD or LDs, the partial LD line including the largest number of LDs is selected as an effective LD line for use in drawing. Spiral correction is performed by dividing image data to be supplied to the LDs into a plurality of virtual small images parallel to the sub-scanning direction which are shifted in a reverse direction to the sub-scanning direction.
Claims6
A scanning method performed, comprising:
- providing an object to be scanned which is rotatable around a rotating axis and having a cylindrical shape;
- providing rotating means for rotating said object to be scanned;
- providing a plurality of light-emitting devices arranged in a line and simultaneously applying a plurality of beams emitted therefrom onto said object to be scanned;
- providing image data supply means for supplying image data to said plurality of light-emitting devices;
- providing sub-scanning means for moving said plurality of light-emitting devices in a sub-scanning direction which is parallel to the rotating axis of said object to be scanned so that said plurality of light-emitting devices scan a surface of said object to be scanned in a spiral fashion;
- detecting damage to any of said light-emitting devices;
- selecting at least one of a plurality of partial light-emitting device lines obtained by partitioning said light-emitting device line at a damaged light-emitting device;
- processing image data of a rectangular Wage by dividing said image data into image data of a plurality of virtual small images parallel to the sub-scanning direction based on the number of light-emitting devices included in said partial light-emitting device line and sequentially shifting the plurality of virtual small images in a reverse direction to the sub-scannig direction in accordance with positions of the plurality of virtual small images in a main scanning direction;
- and
- scanning with the partial light-emitting device line selected in said selecting step based on the image data processed in said image data processing step.
Dependencies are inferred from the claim text.