IC testing apparatus
AssigneeAdvantest Corporation
InventorHiroto Nakamura
Life of this patent
Estimating the term…
Abstract
A tray transfer arm 205 for transferring one or more customer trays KST which hold semiconductor devices IC, comprises a pair of tray holders 205a, 205b which are provided substantially in the upper and lower direction.
Claims16
A tray transfer arm for transferring one or more trays which hold semiconductor devices comprising a pair of tray holders which are provided substantially in the upper and lower direction, wherein said pair of tray holders are provided facing away from each other.
An IC testing apparatus which inserts a first type of tray on which semiconductor devices are carried into a loader section, reloads the semiconductor devices to a second type of tray to be conveyed through a test process, inserts the second type of tray into the test process to test the semiconductor devices, stores the test results for each semiconductor device, takes out the second type of tray finished being tested to an unloader section, and reloads the semiconductor devices from the second type of tray to the first type of tray in accordance with the test results and
- ejects the first type of tray finished being reloaded with the semiconductor devices from the second type of tray in the unloader section from that unloader section and inserts another first type of tray into that unloader section comprising:
- a tray transfer arm which has at least one pair of tray holders provided substantially in the upper and lower direction and provided to be able to store the first type of tray, the pair of tray holders facing away from each other.
An IC testing apparatus which inserts a first type of tray on which semiconductor devices are carried into a loader section, reloads the semiconductor devices to a second type of tray to be conveyed through a test process, inserts the second type of tray into the test process to test the semiconductor devices, stores the test results for each semiconductor device, takes out the second type of tray finished being tested to an unloader section, and reloads the semiconductor devices from the second type of tray to the first type of tray in accordance with the test results and
- ejects the first type of tray finishing reloading the semiconductor devices to the second type of tray in the loader sector from that loader section and inserts the first type of tray loaded with the semiconductor devices to be tested next into that loader section,
- a tray transfer arm which has at least one pair of tray holders provided substantially in the upper and lower direction and provided to be able to store the first type of tray, the pair of tray holders facing away from each other.
Dependencies are inferred from the claim text.