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US 6,248,216 B1Granted
Efficient production of particles by chemical reaction
AssigneeNanoGram Corporation
InventorsXiangxin Bi, Nobuyuki Kambe
Life of this patent
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Abstract
A method for efficiently producing particles from gas phase chemical reactions induced by a radiation beam. The apparatus includes a reaction chamber and an elongated reactant inlet, where the reaction chamber is configured to conform generally to the elongated shape of the reactant inlet. Shielding gas may be introduced to form a blanket of inert gas on both sides of the reactant stream. A feed back loop may be used to maintain the desired pressure within the reaction chamber.
Claims26
A method for producing particles comprising:
- a) introducing a reactant gas into a reaction chamber in the form of an elongated reactant stream with a cross section perpendicular to its flow, the cross section being characterized by a major axis along a length and a minor axis along a width, where the reaction chamber is configured to conform generally to the shape of the reactant stream;
- and
- b) projecting a radiation beam through the reaction chamber along a path along the major axis of the reactant stream, thereby inducing a reaction in the reactant gas to form the particles.
A method of producing particles comprising:
- introducing a reactant gas into a reaction chamber;
- inducing a reaction of the reactant gas to form particles;
- and
- changing the degree of opening of a valve between a pump and a particle collector to adjust the pressure in the reaction chamber during the reaction based on measurements of the pressure within the reaction chamber.
1 more element
Dependencies are inferred from the claim text.