Control device for a work carrying system

In a work carrying system comprising:

• a work processing device having a transfer chamber to which a work carrying robot is disposed, a plurality of process chambers disposed adjacent to the transfer chamber which implement various types of processes on a work, a plurality of gate means each being disposed between each of the process chambers and the transfer chamber, for performing opening and closing actions, and a plurality of gate open and close sensors each for detecting an open or closed state of each of the plurality of gate means;
• the work carrying robot being adopted to transfer the work positioned at a transfer origin process chamber among the plurality of process chambers to a transfer destination process chamber along a predetermined movement path through the gate means of the transfer origin process chamber, the transfer chamber and the gate means of the transfer destination process chamber, wherein a specified time is required to open from a close state of the gate means of the transfer origin process chamber and of the transfer destination process chamber during the transfer, characterized by:
• a control device for the work carrying system, which
• previously sets a confirmation start point for starting confirmation of the open and closed state of the gate means of the transfer destination process chamber at a front position where the work makes contact with the gate means of the transfer destination process chamber on the movement path and previously sets a predetermined withdrawal path different from the movement path as a start point of the confirmation start point;
• and which comprises:
• open and close judgement means that starts judgement of the open and closed state of the gate means of the transfer destination process chamber based on the output of the gate open and close sensor from moment the robot passes the confirmation start point;
• and
• speed control means that moves that work to the transfer destination process chamber on the movement path when the open and close judgement means confirms the opening of the gate means of the transfer destination process chamber at a moment when the work passes the confirmation start point, selects the withdrawal path and moves the work when the opening of the gate means of the transfer destination process chamber is not confirmed by the open and close judgement means at the moment when the work passes the confirmation start point, and controls a speed of the work carrying robot such that the work is allowed to return to the movement path at the moment when the open and close judgment means confirms the opening of the gate means of the transfer destination process chamber on the withdrawal path.