Thin film electret microphone

Abstract

A small, inexpensive, high quality electret formed by micro-machining technology on a support surface, and further including a small, inexpensive, high quality, self-powered electret sound transducer, preferably in the form of a microphone, formed by micro-machining technology. Each microphone is manufactured as a two-piece unit, comprising a microphone membrane unit and a microphone back plate, at least one of which includes an electret formed by micro-machining technology. When juxtaposed, the two units form a highly reliable, inexpensive microphone that can produce a signal without the need for external biasing, thereby reducing system volume and complexity. In the preferred embodiment, the electret material used is a thin film of spin-on polytetrafluoroethylene (PTFE). An electron gun preferably is used for charge implantation. The electret has a saturated charged density in the range of about 2×105 C/m2 to about 8×10−4 C/m2. Thermal annealing is used to stabilize the implanted charge. Two prototype micro-machined electret microphones have been fabricated and tested. An open circuit sensitivity of about 0.5 mV/Pa has been achieved for a hybrid microphone package.

Dependencies are inferred from the claim text.