Integrated management of semiconductor process data
AssigneeSamsung Electronics Co., Ltd.
InventorJong-hyun Yun
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AssigneeSamsung Electronics Co., Ltd.
InventorJong-hyun Yun
Estimating the term…
A method for integrated management of semiconductor process data. The method is capable of easily accessing data generated in one semiconductor fabrication line, and commonly sharing and easily accessing data generated in a plurality of semiconductor fabrication lines. An integrated management system (IMS) is installed in every semiconductor fabrication lines and allows integrated management of the semiconductor process data. Each IMS is in communication with every other IMS and includes a plurality of data sets and corresponding data set modules. Then a user interface computer logs into a contacted IMS. A work environment, including a contacted data set module, is updated at the user interface computer using information from the contacted IMS. A task is then carried out at the user interface computer according to the updated work environment.
A method for integrated management of semiconductor process data comprising:
Dependencies are inferred from the claim text.