Multiple beam scanner for an inspection system

An inspection system using at least dark field imaging, the system comprising:

• a source generating a plurality of light beams;
• a scanner or scanners simultaneously scanning said light beams over a plurality of respective scan lines;
• and
• a sensor system collecting scattered light, spatially separating between the multiple scan lines and temporally separating pixels within said multiple scan lines.

An inspection system using at least dark field imaging, the system comprising:

• a source generating a plurality of light beams;
• a scanner or scanners simultaneously scanning said light beams over a plurality of respective scan lines, said light beams being essentially normal to an inspected surface of an object being scanned;
• and
• at least one scattered light collection system which collects light scattered at at least one oblique angle to the inspected surface from each of the light beams onto a respective one of a plurality of sensors.