US 6,236,281 B1Granted

Q-controlled microresonators and tunable electronic filters using such resonators

AssigneeThe Regents of the University of California

InventorsClark Tu-Cuong Nguyen, Roger T. Howe

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A Q-controlled microresonator and devices including such resonators.

Dependent claims

Claims aren’t available for this document.

H03H 9/02377
Folded-flexure: symmetric folded-flexure
G01R 33/0286
Electrodynamic magnetometers: comprising microelectromechanical systems [MEMS]
H01G 5/14
Using variation of effective area of electrode: due to longitudinal movement of electrodes
H03H 9/02393
Of microelectro-mechanical resonators: post-fabrication trimming of parameters, e.g. resonance frequency, Q factor

From the US filing history. Foreign family members aren’t listed.

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