Charged particle detector
AssigneeE1-MUL Technologies Ltd.
InventorIsaac Shariv
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Abstract
A device for directing a primary particle beam at a sample and detecting particles in accordance with the emergence of particles from the sample. The device comprises a source for generating the primary beam and a passage leading from the source to the sample. It has one end towards the source and a second end towards the sample and, alongside the passage, is placed a particle detector having a face for receiving particles to be detected. At the first end of the passage is placed a cover suitable for generating secondary electrodes, which has a central aperture for admitting the primary beam. The particle detector is orientated with the face for receiving particles towards the cover.
Claims11
A device for directing a primary electron beam at a sample and detecting electrons in accordance with the emergence of electrons from the sample, said device comprising a source for generating said primary beam and a passage leading from said source to said sample and having a first end towards said source and a second end towards said sample and wherein alongside said passage is placed at least one microchannel plate electron detector having a face for receiving electrons to be detected, wherein at said first end of said passage is placed a cover suitable for generating secondary electrons and having a central aperture for admitting said primary beam and wherein said at least one electron detector is orientated with said face for receiving electrons towards said over.
A detector for charged electrons having a face for receiving charged electrons, a microchannel electron multiplier plate located at said face, a reflector located behind said plate with respect to said face and a grid anode located between said plate and said reflector.
Dependencies are inferred from the claim text.