Infrared sensor
AssigneeMatsushita Electric Works, Ltd.
InventorsYoshifumi Watabe, Yoshiaki Honda, Kouichi Aizawa, Tsutomu Ichihara
Life of this patent
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Abstract
An infrared sensor is formed with a first infrared detecting element for infrared detection disposed in a container through a supporting substrate, and a second infrared detecting element for temperature compensation also disposed in the container to be shielded by the supporting substrate of the first infrared detecting element from incident infrared within the container, while a temperature sensing section of the first infrared detecting element is born in non-contacting state with respect to a supporting part of the substrate for the element, whereby the sensitivity can be remarkably improved with a simpler arrangement while keeping a high precision and inexpensiveness.
Claims21
An infrared sensor comprising a container having an infrared incident window, a first infrared detecting element for infrared detection and disposed inside the container as supported by a supporting part of a substrate in opposition to the incident window, and a second infrared detecting element for temperature compensation and disposed inside the container with the infrared shielded by the supporting substrate of the first infrared detecting element from being incident on the second infrared detecting element, wherein the first and second infrared detecting elements include respectively a temperature sensing section, the temperature sensing section of at least the first infrared detecting element being supported in a non-contacting state with respect to the supporting part for the element, a temperature variation at the temperature sensing section of the first infrared detecting element is converted into an electric detection signal, and the temperature sensing section of the second infrared detecting element is substantially equalized in the heat capacity and heat conductance through ambient gas to the temperature sensing section of the first infrared detecting element.
An infrared sensor comprising a container having an infrared incident window, a first infrared detecting element for infrared detection and disposed inside the container as supported by a supporting part of a substrate in opposition to the incident window, and a second infrared detecting element for temperature compensation and disposed inside the container with the infrared shielded by the supporting substrate of the first infrared detecting element from being incident on the second infrared detecting element, wherein the first infrared detecting element includes a temperature sensing section which is supported in non-contacting state with respect to the supporting part for the element, a temperature variation at the temperature sensing section of the first infrared detecting element is converted into an electric detection signal, further comprising means for measuring the temperature of at least one of the first and second infrared detecting elements and the container, a measured temperature value of which means being used for correcting the electric detection signal to render any error in the signal occurring due to change in the ambient temperature to be substantially zero.
An infrared sensor comprising a container having an infrared incident window, the container including inner walls of a first reflectance and a coating of a material having a second reflectance that is lower than the first reflectance, a first infrared detecting element for infrared detection and disposed inside the container and supported by a supporting part of a substrate in opposition to the incident window, and a second infrared detecting element for temperature compensation disposed inside the container with the infrared shielded by the supporting substrate of the first infrared detecting element from being incident on the second infrared detecting element, wherein the first infrared detecting element includes a temperature sensing section which is supported in non-contacting state with respect to the supporting part for the element, and a temperature variation at the temperature sensing section of the first infrared detecting element is converted into an electric detection signal.
An infrared sensor comprising a container having an infrared incident window and an inner wall provided with heat radiating fins, a first infrared detecting element for infrared detection and disposed inside the container as supported by a supporting part of a substrate in opposition to the incident window, and a second infrared detecting element for temperature compensation and disposed inside the container with the infrared shielded by the supporting substrate of the first infrared detecting element from being incident on the second infrared detecting element, wherein the first infrared detecting element includes a temperature sensing section which is supported in non-contacting state with respect to the supporting part for the element, and a temperature variation at the temperature sensing section of the first infrared detecting element is converted into an electric detection signal.
An infrared sensor comprising a container having an infrared incident window, the container being formed of a pair of metal members formed to define a heat insulating gap therebetween, a first infrared detecting element for infrared detection and disposed inside the container as supported by a supporting part of a substrate in opposition to the incident window, and a second infrared detecting element for temperature compensation and disposed inside the container with the infrared shielded by the supporting substrate of the first infrared detecting element from being incident on the second infrared detecting element, wherein the first infrared detecting element includes a temperature sensing section which is supported in non-contacting state with respect to the supporting part for the element, and a temperature variation at the temperature sensing section of the first infrared detecting element is converted into an electric detection signal.
An infrared sensor comprising a container having an infrared incident window, a first infrared detecting element for infrared detection and disposed inside the container as supported by a supporting part of a substrate in opposition to the incident window, the container having an inner portion within sight of the first infrared detecting element that has a constant infrared radiant emissivity and a second infrared detecting element for temperature compensation and disposed inside the container with the infrared shielded by the supporting substrate of the first infrared detecting element from being incident on the second infrared detecting element, wherein the first infrared detecting element includes a temperature sensing section which is supported in non-contacting state with respect to the supporting part for the element, and a temperature variation at the temperature sensing section of the first infrared detecting element is converted into an electric detection signal.
An infrared sensor comprising a container having an infrared incident window, a first infrared detecting element for infrared detection and disposed inside the container as supported by a supporting part of a substrate in opposition to the incident window, the container having an inner portion within sight of the first infrared detecting element that is low in infrared radiant emissivity, and a second infrared detecting element for temperature compensation and disposed inside the container with the infrared shielded by the supporting substrate of the first infrared detecting element from being incident on the second infrared detecting element, wherein the first infrared detecting element includes a temperature sensing section which is supported in non-contacting state with respect to the supporting part for the element, and a temperature variation at the temperature sensing section of the first infrared detecting element is converted into an electric detection signal.
Dependencies are inferred from the claim text.