Piezoelectric actuators and method of making same
AssigneeMassachusetts Institute of Technology
InventorsYet-Ming Chiang, Gregory W. Farrey, Nesbitt W. Hagood, IV, Andrey Soukhojak, Haifeng Wang
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AssigneeMassachusetts Institute of Technology
InventorsYet-Ming Chiang, Gregory W. Farrey, Nesbitt W. Hagood, IV, Andrey Soukhojak, Haifeng Wang
Estimating the term…
A single crystal perovskite material is provided having the formula, MαBiβM′γM″δO3±z, where M is one or more of Na, K, Rb and Cs; M′ is one or more of Ca, Sr, Ba, Pb, Y, La, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and M″ is one or more of Ti, Zr, Hf, Sn, Ge, Mg, Zn, Al, Sc, Ga, Nb, Mo, Sb, Ta and W; where z≦0.1; 0.9≦δ≦1.1; α, β and γ are greater than zero; and (α+β+γ) is in the range of about 0.75 to 1.1. A perovskite material of the formula, NaωMαBiβM′γM″δO3±z, is provided where M is one or more of K, Rb and Cs; M′ is one or more of Ca, Sr, Ba, Pb, Y, La, Pr, Nd, Sm, Eu, Gd, Th, Dy, Ho, Er, Tm, Yb and Lu; M″ is one or more of Ti, Zr, Hf, Sn, Ge, Mg, Zn, Al, Sc, Ga, Nb, Mo, Sb, Ta and W; where z≦0.1; 0.9≦δ≦1.1; α, β and γ are greater than zero; and (α+β+γ) is in the range of about 0.75 to 1.1. The materials exhibit improved d33 and piezoelectric strain values, as well as low hysteresis.
A piezoelectric ceramic material, comprising:
A piezoelectric ceramic material, comprising:
The piezoelectric material of claim 12, wherein the exposed plane is the {001} plane of the corresponding cubic phase.
The piezoelectric material of claim 14 or 15, wherein parameters α, β and γ are selected such that the piezoelectric material lies near a morphotropic phase boundary or point.
A piezoelectric ceramic material, comprising:
A piezoelectric ceramic material, comprising:
A piezoelectric material, comprising:
A piezoelectric material, comprising:
A piezoelectric material, comprising:
A single crystal fiber, comprising;
A piezoelectric material, comprising:
Dependencies are inferred from the claim text.