Visualizing methods for dispatch and diagnosis of finite machines for semiconductor's manufacturing
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsueh-Cheng Wu, Li-Ren Lin, Yuh-Dean Tsay
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsueh-Cheng Wu, Li-Ren Lin, Yuh-Dean Tsay
Estimating the term…
A visualizing method for the working condition of the semiconductor's manufacturing machines is disclosed. Firstly, the datas of different stages in a processing line are collected from the key-stage report of the processing line. The datas are “MAIN”, “MRUN”, “AFTER” and “PRE”, meaning the working condition of the stage. Every stage has a group of data. Specified stage-pairs in the processing line are determined. These pairs are photolithography and etching, photolithography and implanting and others. The data of each stage-pair is sequentially put in a bar chart. Then the pairs are sequentially arranged in the order of the processing line. One pair has a supplied stage and a requested stage. From the bar chart, supervisors of the processing line know the condition and the priority of every pair, and the relationship between the supplied stage and requested stage. According to the visual presentation, the supervisors can easily make decisions of the allocation of the tools in the processing line.
A visualizing method of dispatching and diagnosis of finite machines for facilitating tool allocation while manufacturing semiconductor wafers, said method comprising the steps of:
A method for visualizing a working condition of stages in semiconductor manufacturing, comprising the steps of:
Dependencies are inferred from the claim text.