Inflatable compliant bladder assembly

An inflatable bladder assembly for use in an electroplating cell apparatus, the inflatable bladder assembly comprising:

• a) a substrate mounting plate having one or more inlets formed therein;
• b) a manifold secured to the substrate mounting plate, the manifold having one or more outlets in fluid communication with the one or more inlets;
• c) an inflatable bladder secured to the substrate mounting plate by the manifold, the inflatable bladder being in fluid communication with the one or more outlets;
• d) a fluid source in communication with the one or more inlets;
• e) a port formed in the substrate mounting plate;
• and
• f) a vacuum/pressure pumping system coupled to the port and capable of selectively supplying a vacuum or pressure.

An apparatus for electroplating a substrate comprising:

• a) an electroplating cell body;
• b) an electrode disposed at a first end of the body;
• c) a contact ring at least partially disposed within the cell body at a second end;
• d) one or more power supplies coupled to the contact ring;
• e) an inflatable bladder assembly disposed opposite the contact ring and comprising a substrate mounting plate and an inflatable bladder secured thereto;
• f) a fluid source in communication with the inflatable bladder;
• g) a port formed in the substrate mounting plate;
• and
• h) a vacuum/pressure pumping system coupled to the port and capable of selectively supplying a vacuum or pressure.

A method for securing a substrate to a seating surface for processing in an electrolytic cell, comprising:

• a) providing an inflatable bladder opposite the seating surface, wherein the inflatable bladder is secured to a substrate mounting member comprising a port, and wherein the port is coupled to a vacuum/pressure system capable of selectively applying a vacuum or pressure;
• b) disposing the substrate on the seating surface by applying a vacuum to the port;
• and
• c) inflating the inflatable bladder to bias the substrate onto the seating surface.

An inflatable bladder assembly for use in a substrate processing apparatus, the inflatable bladder assembly comprising:

• a) a mounting member;
• b) an inflatable bladder disposed at least partially on the mounting member and positioned to contact the periphery of a substrate;
• c) a port formed in the mounting member;
• and
• d) a vacuum/pressure pumping system coupled to the port and capable of selectively supplying a vacuum or pressure to the backside of a substrate.