Heat treatment system using ring-shaped radiation heater elements
OwnerIchiro Takahashiinventor
Life of this patent
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Abstract
In a heat treatment system for heating a semiconductor wafers, around a processing chamber is defined an enclosed heating chamber that can be either filled with gases or evacuated. The heater elements consist of halogen infrared lamps received in concentric grooves having a mirror surface. It is therefore possible to achieve a favorable heat insulation which contributes to a high heat efficiency. When the heating chamber is filled with gases or air, it is possible to achieve a controlled rapid cooling of the processing chamber, and this contributes to a short turnaround time of the heat treatment system.
Claims20
A heat treatment system for heating a disk-shaped workpiece, comprising:
- an outer casing;
- an inner shell received in said outer casing and defining an enclosed cylindrical processing chamber therein, said inner shell being made of radiation heat transmitting material and provided with an inlet and an outlet for admitting and removing processing gases into and out of said processing chamber;
- an enclosed heating chamber defined between said outer casing and said inner shell, said heating chamber being provided with a port for introducing gas into said heating chamber and a port for evacuating said heating chamber;
- and
- a plurality of ring-shaped heater elements disposed concentrically on an inner axial end surface of said outer casing, said heater elements being provided with individual power feed segments.
A heat treatment system for heating a disk-shaped workpiece, comprising:
- an outer casing;
- an inner shell received in said outer casing and defining an enclosed cylindrical processing chamber therein for receiving said workpiece in a concentric arrangement, said inner shell being made of radiation heat transmitting material and provided with an inlet and an outlet for admitting and removing processing gases into and out of said processing chamber;
- a heating chamber defined between said outer casing and said inner shell;
- and
- a plurality of ring-shaped heater elements disposed concentrically on an inner surface of said outer casing.
Dependencies are inferred from the claim text.