Method for automating manufacture of photomask
AssigneeMotorola, Inc.
InventorsDavid Kerszykowski, Robert Dwayne Colclasure, Jr., John Michael Garbayo, Raymond Leo Miller, Jr.
Life of this patent
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Abstract
A computer system (10) and method for automating manufacture of a photomask. The computer system (10) has a product database (21) that stores information used to manufacture the photomask. In addition, a semiconductor device is manufactured using the information stored in the product database (21). The information is transmitted to the product database (21) from semiconductor satellite systems such as a fabrication facility (14), a first mask shop (12), and a second mask shop (13). The computer system (10) chooses a mask shop for producing the photomask by using the information transmitted form the first mask shop (12) and the second mask shop (13).
Claims13
A method for automating manufacture of a photomask used for manufacturing a semiconductor device, comprising the steps of:
- transmitting layout data of the semiconductor device to a database;
- transmitting schedule data of a first mask shop to the database;
- transmitting schedule data of a second mask shop to the database;
- evaluating the schedule data of the first mask shop and the schedule data of the second mask shop to determine which mask shop is available to manufacture the photomask;
- choosing the first mask shop to manufacture the photomask after evaluating the schedule data in the database;
- manufacturing the photomask using information stored in the database;
- and
- manufacturing the semiconductor device using information stored in the database.
A method for automating ordering of a replacement photomask, comprising the steps of:
- storing layout data of a semiconductor device in a database;
- transmitting photomask use data from a fabrication facility to the database;
- choosing a mask shop using information stored in the database;
- and
- manufacturing the replacement photomask at the mask shop using information stored in the database;
- and
- manufacturing the semiconductor device using information stored in the database.
Dependencies are inferred from the claim text.