US 6,220,831 B1Granted

Turbomolecular pump

AssigneeEbara Corporation

InventorsAtsushi Shiokawa, Matsutaro Miyamoto, Hiroshi Sobukawa, Toshiharu Nakazawa

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Abstract

A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.

Claims10

Dependent claims

A turbomolecular pump, comprising:

a rotor housed in a casing;
a stator housed in said casing, said rotor and said stator forming a gas exhaust channel therebetween;
a suction port formed in said casing;
an exhaust port formed at the outer peripheral portion of said stator;
a valve body for opening and closing said suction port, wherein said valve body is movable in an axial direction of said casing;
a valve body supporting rod having an upper portion connected to said valve body, said valve body supporting rod extending through a throughhole formed in said rotor and/or said stator;
a valve body driving mechanism for driving said valve body via said valve body supporting rod;
and
magnetic bearing units for non-contactingly supporting said valve body supporting rod within said throughhole,
wherein said valve body driving mechanism includes an actuator provided at a lower portion of said casing and connected to a lower portion of said valve body supporting rod.

7 more elements

Dependencies are inferred from the claim text.