Pad conditioner cleaning apparatus
AssigneeApplied Materials, Inc.
InventorsRaijiro Koga, Hiromi Tsuruta, Takashi Kumagai, Gee Hoey, Brian J. Brown, Boris Fishkin, Fred C. Redeker
Life of this patent
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Abstract
A cleaning cup for holding and cleaning a pad conditioner having a conditioner head, the cleaning cup includes a spray nozzle for spraying a cleaning solution on a top side of the conditioner head. The cleaning cup further includes a plurality of support pins extending upwards from a base of the cleaning cup to receive the conditioner head thereon.
Claims18
A chemical mechanical polishing apparatus, comprising:
- a pad conditioner having a conditioner head;
- and
- a cleaning cup having a base and a wall extending upward from the base for holding and cleaning the conditioner head, the cleaning cup including a spray nozzle for spraying a cleaning solution onto the conditioner head.
A chemical mechanical polishing apparatus, comprising:
- a pad conditioner having a conditioner head;
- a cleaning cup having a base and a wall extending upward from the base for holding and cleaning the conditioner head;
- and
- a cleaning solution dispenser that provides a flowing cleaning solution onto a top side of the conditioner head.
A method of cleaning a chemical mechanical polishing apparatus, comprising the steps of:
- placing a pad conditioner including a conditioner head in a cleaning cup;
- and
- turning on a cleaning solution dispenser to provide a cleaning solution onto a top side of the conditioner head.
Dependencies are inferred from the claim text.