Process for producing a speed of rotation coriolis sensor

A process for manufacturing a rate-of-rotation sensor including a substrate structure, the substrate structure including deflectable resonator masses and springs, the deflectable resonator masses situating an evaluation arrangement for detecting Coriolis accelerations, and a driving arrangement for exciting a planar vibration of the deflectable resonator masses, the deflectable resonator masses being resiliently suspended on a substrate, the process comprising the steps of:

• a) in a single sequence operation, plasma-etching the substrate structure and a driving arrangement into a top side of a silicon-on-insulator (SOI) wafer, the SOI wafer including a buried oxide layer;
• b) wet-etching an opening through a bulk substrate and underneath the substrate structure and the driving arrangement, the bulk substrate forming a rear side of the SOI wafer;
• and
• c) removing the buried oxide layer underneath the substrate structure and the driving arrangement.