Method and apparatus for substrate transfer and processing

An apparatus for processing a substrate, comprising:

• a first chamber;
• a second chamber in selective communication with the first chamber;
• a third chamber in selective communication with the second chamber;
• a substrate transfer shuttle moveable along a shuttle path between a first position in the first chamber, a second position in the second chamber, and a third position in the third chamber, to transfer a substrate between the chambers;
• a first drive mechanism configured to move the substrate transfer shuttle along at least a portion of the shuttle path between the first and second chambers;
• a second drive mechanism configured to move the substrate transfer shuttle along at least a portion of the shuttle path between the second and third chambers;
• a control system to control the first and second drive mechanisms and configured to:
• drive the substrate transfer shuttle from the first position toward the third position through an intermediate position wherein the substrate transfer shuttle at least partially engages the second drive mechanism;
• and
• receive an input indicative of the substrate transfer shuttle having a passed through the intermediate position,
• whereby transfer of the substrate transfer shuttle is synchronized between the first drive mechanism and the second drive mechanism.

A method for processing a substrate, comprising:

• moving a substrate transfer shuttle along a shuttle path between a first position in a first chamber and through a second position in a second chamber and to a third position in a third chamber to transfer a substrate between the first chamber and the third chamber;
• controlling a drive mechanism for each of the first, second, and third chambers to move the substrate transfer shuttle along associated portions of the shuttle path, wherein said controlling includes:
• powering the drive mechanism for the first chamber to drive the substrate transfer shuttle from the first position toward the third position and through an intermediate position wherein the substrate transfer shuttle begins to engage and be driven by the drive mechanism for the second chamber;
• receiving an input indicative of the substrate transfer shuttle having passed through the intermediate position;
• powering the drive mechanism for the second chamber to drive the substrate transfer shuttle from the intermediate position toward the third position.

An apparatus for processing a substrate, comprising:

• a first chamber;
• a second chamber in communication with the first chamber;
• a substrate transfer shuttle moveable along a shuttle path between a first position in the first chamber and a second position in the second chamber to transfer a substrate between the first chamber and the second chamber;
• a drive mechanism between the first and second chambers configured to move the substrate transfer shuttle along an associated portion of a shuttle path, the drive mechanism including:
• powered drive members isolated from the chambers;
• and
• non-powered members substantially isolated from processes carried out within the chambers;
• and
• a control system to control the drive mechanism and configured to power the drive mechanism to drive the substrate transfer shuttle from the first position to the second position.

An apparatus for processing a substrate, comprising:

• a load lock chamber;
• a processing chamber in communication with the load lock chamber;
• a substrate transfer shuttle moveable along a shuttle path between a first position in the load lock chamber and a second position in the processing chamber to transfer a substrate between the load lock chamber and the processing chamber;
• a drive mechanism isolated from the chambers and located between the load lock chamber and processing chamber, the drive mechanism configured to move the substrate transfer shuttle along an associated portion of a shuttle path;
• and
• a control system configured to control the drive mechanism and to power the drive mechanism to drive the substrate transfer shuttle from at least the first position to the second position.