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US 6,213,049 B1Granted
Nozzle-injector for arc plasma deposition apparatus
AssigneeGeneral Electric Company
InventorBarry Lee-Mean Yang
Life of this patent
Estimating the term…
Abstract
A nozzle-injector was designed and fabricated for plasma deposition of thin-film coatings using a wall-stabilized arc torch as the plasma generator. The design of the nozzle-injector controls the injection, ionization, and reaction of the reagents, and these functions, in turn, determine the coating deposition rate, coating area, coating composition, and coating quality.
Claims23
A deposition apparatus comprising:
- a cathode;
- an electrically conductive cascade plate having an aperture;
- an anode having an aperture which diverges in a flow direction;
- and
- a nozzle having an aperture which diverges in the flow direction and extends from the anode.
2 more elements
A deposition apparatus comprising:
- a cathode;
- an anode having an aperture which diverges in a flow direction;
- and
- a nozzle having an aperture which diverges in the flow direction;
- wherein the nozzle includes an inlet formed on an inner surface of the nozzle, and the inlet is located closer to the anode than to a divergent end of the nozzle.
2 more elements
A deposition apparatus comprising:
- a cathode;
- an anode;
- and
- a diverging nozzle having first and second inlets;
- wherein a length of the nozzle is more than three times a distance from the anode to the first inlet;
- and
- wherein the length of the nozzle is more than two times a distance from the anode to the second inlet.
4 more elements
A deposition apparatus comprising:
- a cathode;
- an electrically conductive cascade plate having a conical aperture which diverges in a flow direction;
- and
- an anode.
1 more element
A deposition apparatus comprising:
- a cathode;
- an anode having an aperture which diverges in a flow direction;
- and
- a nozzle injector, extending from the anode, having inner walls which diverge in a flow direction, the nozzle injector further comprising at least one ring-shaped conduit having holes in fluid communication with the inner walls through which holes a gaseous reactant flows into a plasma.
1 more element
Dependencies are inferred from the claim text.