Flexible thin film capacitor having an adhesive film
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsNaoki Kohara, Taisuke Sawada, Masatoshi Kitagawa
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Abstract
According to a flexible thin film capacitor of the present invention, an adhesive film is formed on a substrate composed of at least one selected from the group consisting of an organic polymer and a metal foil, and an inorganic high dielectric film and metal electrode films are formed thereon. A metal oxide adhesive film can be used as the adhesive film. The adhesive film is formed in contact with the inorganic high dielectric film and at least one of the metal electrode films.
Claims14
A flexible thin film capacitor comprising a substrate formed of at least one selected from the group consisting of an organic polymer and a metal foil, and an inorganic high dielectric film and metal electrode films formed on the substrate, the inorganic high dielectric film being interposed between the metal electrode films,
- wherein the inorganic high dielectric film and at least one of the metal electrode films are formed in contact with an adhesive film on the substrate, thereby being integrated with the substrate by the adhesive film.
Dependencies are inferred from the claim text.