Slider and method for manufacturing the same
AssigneeTDK Corporation
InventorYoshitaka Sasaki
Life of this patent
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Abstract
The present invention makes it possible to manufacture a slider having two surfaces at different depths relative to a flying surface. First etching is performed to form a second surface corresponding to a step portion using a photoresist mask; thereafter, another photoresist mask is formed on a region to become a second surface of the slider bar without removing the former photoresist mask; and second etching is performed using those photoresist masks to form a third surface corresponding to a negative pressure generating portion.
Claims12
A method for manufacturing a slider having a first surface to serve as a flying surface, a second surface formed in a position at a predetermined first depth relative to said first surface, a third surface formed in a position at a predetermined second depth relative to said first surface greater than said first depth, and a side surface connecting said first surface and said third surface, the side surface having no step, the method comprising the steps of:
- forming a first etching mask on a region of the material of the slider to become said first surface;
- etching said material to said first depth using said first etching mask to form said second surface;
- forming a second etching mask at least on a region of said material to become said second surface excluding a region to become said third surface without removing said first etching mask;
- etching said material further using said first and second etching masks by an amount corresponding to the difference between said second and first depths to form said third surface;
- and
- removing said first and second etching masks from said material.
A slider having a first surface to serve as a flying surface, a second surface formed in a position at a predetermined first depth relative to said first surface, a third surface formed in a position at a predetermined second depth relative to said first surface greater than said first depth, and a side surface connecting said first surface and said third surface, the side surface having no step, the slider produced by a method comprising the steps of:
- forming a first etching mask on a region of the material of the slider to become said first surface;
- etching said material to said first depth using said first etchings mask to form said second surface;
- forming a second etching mask at least on a region of said material to become said second surface excluding a region to become said third surface without removing said first etching mask;
- etching said material further using said first and second etching masks by an amount corresponding to the difference between said second and first depths to form said third surface;
- and
- removing said first and second etching masks from said material.
Dependencies are inferred from the claim text.