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US 6,212,012 B1Granted
Laser optical apparatus
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKoichiro Tanaka
Life of this patent
Estimating the term…
Abstract
There is provided a structure for reducing optical loss in an optical apparatus (homogenizer) for making the intensity distribution of a laser beam uniform. In a multi-cylindrical lens (a glass substrate having a multiplicity of cylindrical lenses formed thereon) used in a homogenizer, convex cylindrical lenses and concave cylindrical lenses are arranged alternately, and the boundaries between the cylindrical lenses have a smooth structure. This makes it possible to reduce scattering of beams that has occurred at the boundaries between the cylindrical lenses.
Claims27
A laser optical apparatus for forming a laser beam comprising:
- a homogenizer located between a laser oscillator and an object to be irradiated, said homogenizer comprising at least one multi-cylindrical lens;
- and
- at least one converging lens located between said homogenizer and said object to be irradiated,
- wherein said at least one multi-cylindrical lens comprises a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately, and
- a convex surface of one of said convex cylindrical lenses and a concave surface of one of said concave cylindrical lenses adjacent to each other are smoothly continuous without having an angle therebetween.
2 more elements
A laser optical apparatus for forming a laser beam comprising:
- a homogenizer located between a laser oscillator and an object to be irradiated, said homogenizer comprising two multi-cylindrical lenses;
- and
- at least one converging lens located between said homogenizer and said object to be irradiated,
- wherein each of two multi-cylindrical lenses comprises a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately,
- a convex surface of one of said convex cylindrical lenses and a concave surface of one of said concave cylindrical lenses adjacent to each other are smoothly continuous without having an angle therebetween, and
- said two multi-cylindrical lenses are arranged in directions perpendicular to each other.
3 more elements
A laser optical apparatus comprising:
- a laser oscillator for producing a laser beam;
- a first multi-cylindrical lens comprising a plurality of first convex lenses and first concave lenses arranged alternately wherein said first multi-cylindrical lens condenses and diverges said laser beam from said laser oscillator only in a first direction;
- a second multi-cylindrical lens comprising a plurality of second convex lenses and second concave lenses arranged alternately wherein said second multi-cylindrical lens condenses and diverges the laser beam passing through the first multi-cylindrical lens only in a second direction orthogonal to said first direction;
- and
- a converging lens for condensing the laser beam passing through the second multi-cylindrical lens.
2 more elements
A laser optical apparatus comprising:
- a laser oscillator for producing a laser beam;
- a first multi-cylindrical lens comprising a plurality of first convex lenses and first concave lenses arranged alternately wherein said first multi-cylindrical lens condenses and diverges said laser beam from said laser oscillator only in a first direction;
- a second multi-cylindrical lens comprising a plurality of second convex lenses and second concave lenses arranged alternately wherein said second multi-cylindrical lens condenses and diverges the laser beam passing through the first multi-cylindrical lens only in a second direction orthogonal to said first direction;
- a first converging lens for condensing the laser beam passing through the first multi-cylindrical lens;
- and
- a second converging lens for condensing the laser beam passing through the second multi-cylindrical lens.
3 more elements
A laser optical apparatus comprising:
- a laser oscillator for producing a laser beam;
- a beam expander located between said laser oscillator and an object to be irradiated;
- a homogenizer located between said beam expander and said object to be irradiated, said homogenizer comprising at least one multi-cylindrical lens;
- and
- at least one converging lens located between said homogenizer and said object to be irradiated,
- wherein said at least one multi-cylindrical lens comprises a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately, and
- a convex surface of one of said convex cylindrical lenses and a concave surface of one of said concave cylindrical lenses adjacent to each other are smoothly continuous without having an angle therebetween.
4 more elements
A laser optical apparatus comprising:
- a laser oscillator for producing a laser beam;
- a beam expander located between said laser oscillator and an object to be irradiated;
- a homogenizer located between said beam expander and said object to be irradiated, said homogenizer comprising two multi-cylindrical lenses;
- and
- at least one converging lens located between said homogenizer and said object to be irradiated,
- wherein each of two multi-cylindrical lenses comprises a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately,
- a convex surface of one of said convex cylindrical lenses and a concave surface of one of said concave cylindrical lenses adjacent to each other are smoothly continuous without having an angle therebetween, and
- said two multi-cylindrical lenses are arranged in directions perpendicular to each other.
5 more elements
A laser optical apparatus comprising:
- a laser oscillator for producing a laser beam;
- a beam expander for expanding said laser beam;
- a first multi-cylindrical lens comprising a plurality of first convex lenses and first concave lenses arranged alternately wherein said first multi-cylindrical lens condenses and diverges said laser beam from said laser oscillator only in a first direction;
- a second multi-cylindrical lens comprising a plurality of second convex lenses and second concave lenses arranged alternately wherein said second multi-cylindrical lens condenses and diverges the laser beam passing through the first multi-cylindrical lens only in a second direction orthogonal to said first direction;
- and
- a converging lens for condensing the laser beam passing through the second multi-cylindrical lens.
3 more elements
A laser optical apparatus comprising:
- a laser oscillator for producing a laser beam;
- a beam expander for expanding said laser beam;
- a first multi-cylindrical lens comprising a plurality of first convex lenses and first concave lenses arranged alternately wherein said first multi-cylindrical lens condenses and diverges said laser beam from said laser oscillator only in a first direction;
- a second multi-cylindrical lens comprising a plurality of second convex lenses and second concave lenses arranged alternately wherein said second multi-cylindrical lens condenses and diverges the laser beam passing through the first multi-cylindrical lens only in a second direction orthogonal to said first direction;
- a first converging lens for condensing the laser beam passing through the first multi-cylindrical lens;
- and
- a second converging lens for condensing the laser beam passing through the second multi-cylindrical lens.
4 more elements
A laser optical apparatus comprising:
- a laser oscillator for producing a laser beam;
- and
- a homogenizer located between said laser oscillator and an object to be irradiated, said homogenizer comprising at least one multi-cylindrical lens,
- wherein said at least one multi-cylindrical lens comprises a plurality of first convex cylindrical lenses and second convex cylindrical lenses arranged alternately,
- each of said first convex cylindrical lenses has a curved surface which said laser beam enters, and
- each of said second convex cylindrical lenses has a plane surface which said laser beam enters.
3 more elements
Dependencies are inferred from the claim text.