Phase annulus to carry out a positive phase contrast
AssigneeLeica Microsystems Wetzlar GmbH
InventorsSabine Alt-Nedvidek, Claus Gunkel
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Abstract
The invention relates to a phase annulus consisting of a phase shifting thin-film system, which, in the case of a cemented system, has the following structure: (first) substrate-Ag-nH-cement-(second) substrate, or a structure: (first) substrate-n1-Ag-n2-cement-(second) substrate. In the case of an uncemented structure, the thin-film system has the following structure: substrate-Ag-nH-air, wherein nH, n1 or n2 represent the respective refractive index of a dielectric film. Phase shifting of the positive phase contrast can be regulated in a targeted manner.
Claims25
A phase annulus for producing a positive phase shift comprising a cemented phase-shifting thin-layer system including first and second substrates, a silver layer applied directly to said first substrate, a layer having a refractive index nH applied directly to said silver layer, and a transparent cement filling intermediate space between said first and second substrates such that a transparent cement matrix remains between said layer having a refractive index nH and said second substrate.
A phase annulus for producing a positive phase shift comprising a cemented phase-shifting thin-layer system including a substrate, a silver layer applied directly to said substrate, a layer having a refractive index nH applied directly to said silver layer, and another layer having a refractive index nH applied directly to surface areas of said substrate on which no silver layer is applied, wherein said another layer has a thickness greater than a thickness of said silver layer and less than a combined thickness of said silver layer and said layer applied directly to said silver layer.
A phase annulus for producing a positive phase shift comprising a phase-shifting thin-layer system including first and second substrates, a layer having a refractive index n1 applied to said first substrate for producing a phase shift φ, a silver layer applied to said layer having a refractive index n1, a layer having a refractive index n2 applied to said silver layer for protecting said silver layer, and a transparent cement filling intermediate space between said first and second substrates such that a transparent cement matrix remains between said layer having a refractive index n2 and said second substrate.
Dependencies are inferred from the claim text.