Stage unit, drive table, and scanning exposure apparatus using the same

A method of controlling a scanning exposure apparatus that moves a mask, on which a transfer pattern is formed, with respect to a projection optical system while illuminating said mask and synchronously moves a photosensitive substrate with respect to said projection optical system, thereby projecting and exposing said pattern on said mask onto said substrate through said projection optical system, said scanning exposure apparatus including a scanning stage that is movable with respect to the projection optical system, along a first direction corresponding to a moving direction of said mask and said substrate;

• and a fine adjustment stage, arranged to be freely movable within predetermined ranges in the first direction and in a second direction perpendicular to the first direction with respect to said scanning stage;
• said method comprising the steps of:
• driving said fine adjustment stage in the second direction with respect to said scanning stage with a first electromagnetic actuator associated with said fine adjustment stage;
• and
• driving said fine adjustment stage in the first direction with respect to said scanning stage with a second electromagnetic actuator associated with said fine adjustment stage, wherein the second electromagnetic actuator generates a larger thrust than that of said first electromagnetic actuator upon reception of a same input as an input provided to said first electromagnetic actuator.