Impedance matching device
AssigneeKyosan Electric Mfg. Co., Ltd.
InventorsItsuo Yuzurihara, Satoru Matsukawa
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Abstract
An impedance matching device provided between a high-frequency generator and a load device matches an impedance of the high-frequency generator with an impedance of the load device and includes at least a coupled circuit which comprises a core, and a main winding and a control winding which are wound around the core. The coupled circuit changes an impedance of the impedance matching device by changing an inductance value of the main winding which depends on a magnitude of direct current flowing in the control winding.
Claims19
An impedance matching device coupled between a high-frequency generator and a load device for matching an impedance of the high-frequency generator with an impedance of the load device, the device comprising:
- a coupled circuit including a core, a main winding, and a control winding which are each wound around the core;
- and
- a first low pass filter connected across said control winding,
- the coupled circuit setting an impedance of the impedance matching device by changing an inductance value of the main winding, said inductance value depending on a magnitude of a direct current flowing in the control winding.
An impedance matching device connected between a high-frequency generator and a load device, for matching an impedance of the high-frequency generator with an impedance of the load device, the device comprising:
- a first coupled circuit including a first core, a first main winding wound around the first core, a second core, a second main winding wound around the second core, and a first control winding wound around the first and second cores, both the first and second cores passing through each turn of the first control winding;
- a capacitor coupled across the high-frequency generator, connected at a first end to said first coupled circuit;
- and
- a VSWR circuit connected to the high-frequency generator and the first coupled circuit, said VSWR circuit measuring a standing wave created by a return of a high frequency voltage reflected from the load device, and adjusting a voltage standing wave ratio on the basis of the measurement result, wherein an impedance of the impedance matching device is changed by changing an inductance value of each of the first and second main windings, said inductance value depending on a magnitude of a direct current flowing in the first control winding.
Dependencies are inferred from the claim text.