Piezoelectric actuator and method for manufacturing same
AssigneeNEC Corporation
InventorsTorahiko Kanda, Hirofumi Nakamura, Tsutomu Kagami
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Abstract
Disclosed herein is a piezoelectric actuator comprising a plurality of driving columns separated by grooves in which the width of each driving column in the direction of the groove width widens from the displacement output surface to the substrate. The widening of the diving column width toward the substrate realizes a piezoelectric actuator having a high strength and a high reliability capable of stably and effectively generating an output displacement.
Claims7
A piezoelectric actuator comprising a substrate and a plurality of driving columns extending parallel to one another and separated by grooves on said substrate,
- said plurality of driving columns having an active region in a central portion thereof, which is formed by a layered electrode structure including common electrode layers and individual electrode layers alternately layered employing green sheets made of piezoelectric material, and a displacement output surface externally outputting the displacement produced by the piezoelectric effect of said active region on an upper surface of said driving column opposite to said substrate,
- wherein a width of each driving column in the direction of said groove increases from said displacement output surface to said substrate.
Dependencies are inferred from the claim text.