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US 6,211,542 B1Granted
Completely encapsulated top electrode of a ferroelectric capacitor using a lead-enhanced escapsulation layer
AssigneeRamtron International Corporation
InventorsBrian Lee Eastep, Thomas A. Evans
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Abstract
A ferroelectric capacitor includes a bottom electrode, a top electrode, and a ferroelectric layer located between the top and bottom electrodes that extends to completely encapsulate the top electrode, except for a contact hole to allow metalization of the top electrode. The total encapsulation of the top electrode reduces the sensitivity of the ferroelectric capacitor to hydrogen and thus improves electrical switching performance.
Claims11
A ferroelectric capacitor comprising:
- a bottom electrode;
- a top electrode;
- a ferroelectric layer between the top and bottom electrodes;
- and
- a PZT encapsulation layer for completely encapsulating the top electrode, except for a contact hole to allow metalization of the top electrode, wherein at least a portion of the PZT encapsulation layer contains excess lead for replenishing lead lost by the ferroelectric layer during ferroelectric processing.
2 more elements
Dependencies are inferred from the claim text.