Microfluidic channel fabrication method
AssigneeSandia Corporation
InventorsDon W. Arnold, Joseph S. Schoeniger, Gregory F. Cardinale
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AssigneeSandia Corporation
InventorsDon W. Arnold, Joseph S. Schoeniger, Gregory F. Cardinale
Estimating the term…
A new channel structure for microfluidic systems and process for fabricating this structure. In contrast to the conventional practice of fabricating fluid channels as trenches or grooves in a substrate, fluid channels are fabricated as thin walled raised structures on a substrate. Microfluidic devices produced in accordance with the invention are a hybrid assembly generally consisting of three layers: 1) a substrate that can or cannot be an electrical insulator; 2) a middle layer, that is an electrically conducting material and preferably silicon, forms the channel walls whose height defines the channel height, joined to and extending from the substrate; and 3) a top layer, joined to the top of the channels, that forms a cover for the channels. The channels can be defined by photolithographic techniques and are produced by etching away the material around the channel walls.
A microfluidic device, comprising:
A method for fabricating a microfluidic device, comprising:
A microfluidic device, comprising:
A method of forming a capillary structure, comprising:
Dependencies are inferred from the claim text.