Product and process for forming a semiconductor structure on a host substrate
AssigneeInternational Business Machines Corporation
InventorsNestor A. Bojarczuk, Supratik Guha, Arunava Gupta
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Abstract
A process for cheaply fabricating a substantially single crystal or a polycrystalline semiconductor structure on a host substrate. The process begins by depositing a layer of wide band gap nitride material 10, such as gallium nitride, aluminum nitride and/or indium nitride, on a sapphire substrate 11. The semiconductor structure 14 is then grown on the nitride layer. Next, the host substrate 15 is attached with a bonding agent to an exposed surface area of the semiconductor structure 14. The sapphire substrate is lifted off by irradiation in which nitrogen is dissociated from the nitride layer.
Claims6
A process of forming a substantially single crystal or polycrystalline semiconductor on a host substrate, said process comprising:
- depositing on a first surface of a sapphire substrate, a layer of nitride material comprised of one or more nitride films selected from the group consisting of gallium nitride, aluminum nitride, indium nitride and their alloys;
- growing one or more layers of semiconductor material on said nitride material, said layer or layers of semiconductor material forming a semiconductor structure;
- forming a composite structure comprised of said sapphire substrate, said nitride material, said semiconductor structure and a host substrate;
- irradiating a second surface of said sapphire substrate that is opposed to said first surface, with sufficient energy to substantially dissociate enough nitrogen from the nitride material to allow said sapphire substrate to be lifted from said composite structure;
- lifting said sapphire substrate from said composite structure;
- and
- removing any metallic residue from said composite structure.
Dependencies are inferred from the claim text.